Substrate processing apparatus
First Claim
1. A substrate processing apparatus comprising n (n:
- natural number of at least two) processing parts processing a substrate, comprising;
a temperature-controlled air supply part adjusting the temperature of air and delivering said temperature-controlled air;
a manifold formed by branching a common pipe into n distributing pipes for communicatively connecting said common pipe to said temperature-controlled air supply part while communicatively connecting said n distributing pipes to said n processing parts in one-to-one correspondence; and
n correction temperature control parts provided in one-to-one correspondence to said n distributing pipes for temperature-controlling air passing through said distributing pipes.
2 Assignments
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Accused Products
Abstract
A manifold communicatively connects a plurality of coating processing units with an air conditioning unit. The manifold is formed by branching a common pipe into a plurality of distributing pipes. The air conditioning unit performs temperature control to set air passing through a branch point of the manifold to a temperature slightly lower than a target temperature in processing units. Secondary heaters secondarily heat air passing through joints between the distributing pipes and the processing units to the target temperature thereby supplying accurately temperature-controlled air to processing parts. Air from the air conditioning unit is diverted thereby suppressing the height of the overall apparatus. Thus, a substrate processing apparatus capable of inhibiting the height of the overall apparatus from remarkable increase also when vertically stacking processing parts in multiple stages and supplying temperature-controlled air to the processing parts with sufficient accuracy.
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Citations
8 Claims
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1. A substrate processing apparatus comprising n (n:
- natural number of at least two) processing parts processing a substrate, comprising;
a temperature-controlled air supply part adjusting the temperature of air and delivering said temperature-controlled air;
a manifold formed by branching a common pipe into n distributing pipes for communicatively connecting said common pipe to said temperature-controlled air supply part while communicatively connecting said n distributing pipes to said n processing parts in one-to-one correspondence; and
n correction temperature control parts provided in one-to-one correspondence to said n distributing pipes for temperature-controlling air passing through said distributing pipes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
- natural number of at least two) processing parts processing a substrate, comprising;
Specification