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Cathodo-/electro-luminescent device and method of fabricating a cathodo-/electro-luminescent device using porous silicon/porous silicon carbide as an electron emitter

  • US 20030218416A1
  • Filed: 04/16/2003
  • Published: 11/27/2003
  • Est. Priority Date: 05/27/1999
  • Status: Active Grant
First Claim
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1. A method for fabricating a cathodoluminescent/electroluminescent device, said method comprising:

  • forming a transparent conductive layer;

    depositing an insulator onto the transparent conductive layer;

    forming a porous silicon layer from crystalline silicon wafers;

    depositing a phosphor onto the insulator;

    forming an intermediate device by positioning the porous silicon layer so that a porous surface of the porous silicon layer is adjacent the phosphor;

    annealing the intermediate device; and

    depositing a metal layer on a non-porous surface of the porous silicon layer.

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