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DUV and VUV laser with on-line pulse energy monitor

  • US 20030219057A1
  • Filed: 05/14/2003
  • Published: 11/27/2003
  • Est. Priority Date: 05/17/2002
  • Status: Active Grant
First Claim
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1. An excimer or molecular fluorine laser system, comprising:

  • a laser tube containing a gas mixture at least including a halogen-containing species and a buffer gas, and including a heat exchanger and a gas circulation fan therein;

    multiple electrodes within the laser tube connected to a pulsed electrical discharge circuit for energizing the gas mixture at a repetition rate greater than 1 kHz;

    a resonator for generating a sub-250 nm output laser beam; and

    a substantially transmissive energy monitor window in the beam path of the output laser beam.

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