Wafer map host system
First Claim
1. A wafer map host system comprising:
- a database for storing wafer maps;
an interface for providing interfaces to a plurality of wafer manufacturing processes and/or equipment; and
a wafer map processor coupled between said database and said interface wherein various manufacturing process steps and/or equipment use wafer map data and update the data based on the operational functions of the plurality of manufacturing processes and/or equipment.
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Accused Products
Abstract
A wafer map host system and methodology that supports the use of and manipulation of wafer map information for multiple semiconductor processes is disclosed. The system includes a database for storing wafer maps; an interface for providing interfaces to a plurality of wafer manufacturing processes and/or equipment; and a wafer map processor coupled between said database and said interface for managing relationships of various tasks during a wafer map data transaction between the processes and/or equipment and the database. The tasks include deciding which wafer map is required, which equipment is involved, what is the manufacturing flow being used, how to re-map the various bin assignments considering the next manufacturing process, and merging two or more wafer map data for the next manufacturing process.
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Citations
19 Claims
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1. A wafer map host system comprising:
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a database for storing wafer maps;
an interface for providing interfaces to a plurality of wafer manufacturing processes and/or equipment; and
awafer map processor coupled between said database and said interface wherein various manufacturing process steps and/or equipment use wafer map data and update the data based on the operational functions of the plurality of manufacturing processes and/or equipment. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A wafer manufacturing method that provides flexibility in defining and configuring various elements in a wafer map in a workflow comprising the steps of:
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providing a plurality of manufacturing processes and/or equipment of a wafer;
receiving wafer map data at one of said manufacturing processes and/or equipment;
performing said manufacturing and/or equipment processes; and
updating said wafer map and sending said updated wafer map from said manufacturing process and/or equipment and making it available to the other manufacturing processes and/or equipment in the work flow. - View Dependent Claims (10, 11, 12)
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13. A wafer map host system comprising:
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a database for storing wafer maps;
an interface for providing interfaces to a plurality of wafer manufacturing processes and/or equipment; and
a wafer map processor coupled between said database and said interface for managing relationships of various tasks during a wafer map data transaction between the processes and/or equipment and the database. - View Dependent Claims (14, 15, 16, 17, 18, 19)
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Specification