Diagnostic system and method for integrated remote tool access, data collection, and control
First Claim
1. A remote diagnostics system comprising:
- a first internal network in a fabricator (FAB), said FAB having at least one automated manufacturing tool, a tool controller, and internal secure storage means;
a second internal network in an original equipment manufacturer (OEM), said OEM having internal secure storage means;
an external network;
a first secure shared network coupling said first internal network to said external network;
a second secure shared network coupling said second internal network to said external network; and
a secure channel which propagates data from said tool at said FAB to said OEM for e-diagnostics;
wherein said tool generates data proprietary to at least one of said FAB and said OEM.
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Accused Products
Abstract
A remote diagnostics system is presented comprising: a first internal network in a fabricator (FAB), the FAB having at least one automated manufacturing tool, a tool controller, and internal secure storage means; a second internal network in an original equipment manufacturer (OEM), the OEM having internal secure storage means; an external network; a first secure shared network coupling the first internal network to the external network; a second secure shared network coupling the second internal network to the external network; and a secure channel which propagates data from the tool at the FAB to the OEM for e-diagnostics; wherein the tool generates data proprietary to at least one of the FAB and the OEM.
60 Citations
34 Claims
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1. A remote diagnostics system comprising:
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a first internal network in a fabricator (FAB), said FAB having at least one automated manufacturing tool, a tool controller, and internal secure storage means;
a second internal network in an original equipment manufacturer (OEM), said OEM having internal secure storage means;
an external network;
a first secure shared network coupling said first internal network to said external network;
a second secure shared network coupling said second internal network to said external network; and
a secure channel which propagates data from said tool at said FAB to said OEM for e-diagnostics;
wherein said tool generates data proprietary to at least one of said FAB and said OEM. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 13)
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12. The remote diagnostics system of claim 12, wherein said DMZ comprises a file staging area and a proxy server.
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14. A system for remote diagnostics of, and data sharing from, automated manufacturing tools, the system comprising:
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a tool Gateway server, operative to collect and process data from the tools;
a session, operative to provide a specific set of said services to a user from at least one tool, said session comprising a user, a producer, a user filter, and a producer filter;
a service processing application, operative to process sessions and session services;
a policy administrator;
an administrative client;
a collaborative client; and
a plurality of custom business rules. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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29. A method of persisting data comprising the steps of:
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obtaining data from an automated manufacturing tool;
filtering said data;
obtaining a representative sample of said filtered data;
averaging said sample; and
storing said averaged sample for a specific period.
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30. A method of XML format persistence, comprising the steps of:
flattening an XML document wherein all XML tags in said XML document are converted to at least one of a list and an item.
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31. A method of transparently transferring SECS data to an OEM from a FAB, comprising the steps of:
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remotely connecting to an automated semiconductor manufacturing tool at a FAB;
exposing SECs data from said tool;
acting as the host to said tool;
proxying said tool data out to an OEM as if the OEM were local; and
using tunnel to transfer said tool data securely from the FAB to the OEM.
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32. A method of remotely connecting to equipment through enterprise firewalls, comprising the steps of:
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remotely connecting to a tool;
providing a remote tool operation infrastructure;
applying an e-diagnostic solution as a screen proxy for remote tool operation; and
providing an infrastructure which is used to remotely operate tool in the plant floor, which can include remote control and video observation.
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33. A method of application of XSL as Data Filter Mechanism for Fabrication Data, comprising the steps of:
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using XSL filter to protect information by modifying sensitive FAB data before it is released to the OEM;
using XSL filter to protect information by filtering sensitive FAB data before it is released to the OEM; and
using XSL filter to protect information by transforming sensitive FAB data before it is released to the OEM. - View Dependent Claims (34)
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Specification