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Clamshell and small volume chamber with fixed substrate support

  • US 20030221780A1
  • Filed: 11/21/2002
  • Published: 12/04/2003
  • Est. Priority Date: 01/26/2002
  • Status: Active Grant
First Claim
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1. A processing chamber, comprising:

  • a fixed substrate support having a substrate receiving surface;

    a pumping ring disposed around a perimeter of the substrate receiving surface, the pumping ring forming at least a portion of a pumping channel and having one or more apertures formed therethrough; and

    a gas distribution assembly disposed over the fixed substrate support.

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