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Methods for analyzing defect artifacts to precisely locate corresponding defects

  • US 20030222220A1
  • Filed: 02/18/2003
  • Published: 12/04/2003
  • Est. Priority Date: 01/23/2002
  • Status: Active Grant
First Claim
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1. An automated method of locating at least one defect on an object of interest, wherein the object includes at least one defect region corresponding to the defect and a defect-free region absent the defect, the method comprising:

  • a. acquiring an image of the object, the image including image data spatially correlated to the object, the image data including;

    i. defect data spatially correlated to the defect region; and

    ii. defect-artifact data spatially correlated to portions of the defect-free region; and

    b. analyzing the defect-artifact data.

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