Miniature RF and microwave components and methods for fabricating such components
First Claim
1. A coaxial RF or microwave component that preferentially passes a radiation in a desired frequency band, comprising:
- a. at least one RF or microwave radiation entry port in a conductive structure;
b. at least one RF or microwave radiation exit port in the conductive structure;
c. at least one passage, substantially bounded on the sides by the conductive structure, through which RF or microwave radiation passes when traveling from the at least one entry port to the at least one exit port;
d. a central conductor extending along the at least one passage from the entry port to the exit port; and
e. at least one conductive spoke extending between the central conductor and the conductive structure at each of a plurality of locations where successive locations along the length of the passage are spaced by approximately one-half of a propagation wavelength, or an integral multiple thereof, within the passage for a frequency to be passed by the component, wherein one or more of the following conditions are met (1) the central conductor, the conductive structure, and the conductive spokes are monolithic, (2) a cross-sectional dimension of the passage perpendicular to a propagation direction of the radiation along the passage is less than about 1 mm, more preferably less than about 0.5 mm, and most preferably less than about 0.25 mm, (3) more than about 50% of the passage is filled with a gaseous medium, more preferably more than about 70% of the passage is filled with a gaseous medium, and most preferably more than about 90% of the passage is filled with a gaseous medium, (4) at least a portion of the conductive portions of the component are formed by an electrodeposition process, (5) at least a portion of the conductive portions of the component are formed from a plurality of successively deposited layers, (6) at least a portion of the passage has a generally rectangular shape, (7) at least a portion of the central conductor has a generally rectangular shape, (8) the passage extends along a two-dimensional non-linear path, (9) the passage extends along a three-dimensional path, (10) the passage comprises at least one curved region and a side wall of the passage in the curved region has a nominally smaller radius than an opposite side of the passage in the curved region and is provided with a plurality of surface oscillations having smaller radii, (11) the conductive structure is provided with channels at one or more locations where the electrical field at a surface of the conductive structure, if it were there, would have been less than about 20% of its maximum value within the passage, more preferably less than 10% of its maximum value within the passage, even more preferably less than 5% of its maximum value within the passage, and most preferably where the electrical field would have been approximately zero, (12) the conductive structure is provided with patches of a different conductive material at one or more locations where the electrical field at the surface of the conductive structure, if it were there, would have been less than about 20% of its maximum value within the passage more preferably less than about 10% of its maximum value within the passage, even more preferably less than about 5% of its maximum value within the passage, and most preferably where the electrical field would have been approximately zero, (13) mitered corners are used at least some junctions for segments of the passage that meet at angles between 60° and
120°
, and/or (14) the conductive spokes are spaced at an integral multiple of one-half the wavelength and bulges on the central conductor or bulges extending from the conductive structure extend into the passage at one or more locations spaced from the conductive spokes by an integral multiple of approximately one-half the wavelength.
1 Assignment
0 Petitions
Accused Products
Abstract
RF and microwave radiation directing or controlling components are provided that may be monolithic, that may be formed from a plurality of electrodeposition operations and/or from a plurality of deposited layers of material, that may include switches, inductors, antennae, transmission lines, filters, and/or other active or passive components. Components may include non-radiation-entry and non-radiation-exit channels that are useful in separating sacrificial materials from structural materials. Preferred formation processes use electrochemical fabrication techniques (e.g. including selective depositions, bulk depositions, etching operations and planarization operations) and post-deposition processes (e.g. selective etching operations and/or back filling operations).
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Citations
84 Claims
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1. A coaxial RF or microwave component that preferentially passes a radiation in a desired frequency band, comprising:
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a. at least one RF or microwave radiation entry port in a conductive structure;
b. at least one RF or microwave radiation exit port in the conductive structure;
c. at least one passage, substantially bounded on the sides by the conductive structure, through which RF or microwave radiation passes when traveling from the at least one entry port to the at least one exit port;
d. a central conductor extending along the at least one passage from the entry port to the exit port; and
e. at least one conductive spoke extending between the central conductor and the conductive structure at each of a plurality of locations where successive locations along the length of the passage are spaced by approximately one-half of a propagation wavelength, or an integral multiple thereof, within the passage for a frequency to be passed by the component, wherein one or more of the following conditions are met (1) the central conductor, the conductive structure, and the conductive spokes are monolithic, (2) a cross-sectional dimension of the passage perpendicular to a propagation direction of the radiation along the passage is less than about 1 mm, more preferably less than about 0.5 mm, and most preferably less than about 0.25 mm, (3) more than about 50% of the passage is filled with a gaseous medium, more preferably more than about 70% of the passage is filled with a gaseous medium, and most preferably more than about 90% of the passage is filled with a gaseous medium, (4) at least a portion of the conductive portions of the component are formed by an electrodeposition process, (5) at least a portion of the conductive portions of the component are formed from a plurality of successively deposited layers, (6) at least a portion of the passage has a generally rectangular shape, (7) at least a portion of the central conductor has a generally rectangular shape, (8) the passage extends along a two-dimensional non-linear path, (9) the passage extends along a three-dimensional path, (10) the passage comprises at least one curved region and a side wall of the passage in the curved region has a nominally smaller radius than an opposite side of the passage in the curved region and is provided with a plurality of surface oscillations having smaller radii, (11) the conductive structure is provided with channels at one or more locations where the electrical field at a surface of the conductive structure, if it were there, would have been less than about 20% of its maximum value within the passage, more preferably less than 10% of its maximum value within the passage, even more preferably less than 5% of its maximum value within the passage, and most preferably where the electrical field would have been approximately zero, (12) the conductive structure is provided with patches of a different conductive material at one or more locations where the electrical field at the surface of the conductive structure, if it were there, would have been less than about 20% of its maximum value within the passage more preferably less than about 10% of its maximum value within the passage, even more preferably less than about 5% of its maximum value within the passage, and most preferably where the electrical field would have been approximately zero, (13) mitered corners are used at least some junctions for segments of the passage that meet at angles between 60° and
120°
, and/or (14) the conductive spokes are spaced at an integral multiple of one-half the wavelength and bulges on the central conductor or bulges extending from the conductive structure extend into the passage at one or more locations spaced from the conductive spokes by an integral multiple of approximately one-half the wavelength. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A coaxial RF or microwave component that preferentially passes a radiation in a desired frequency band, comprising:
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a. at least one RF or microwave radiation entry port in a conductive structure;
b. at least one RF or microwave radiation exit port in the conductive structure;
c. at least one passage, substantially bounded on the sides by the conductive structure, through which RF or microwave radiation passes when traveling from the at least one entry port to the at least one exit port;
d. a central conductor extending along the at least one passage from the entry port to the exit port; and
e. at a plurality of locations along a length of the passage, a pair of conductive stubs extending from approximately the same position along a length of the passage, one having an inductive property and the other having a capacitive property, each extending into a closed channel that extends from a side of the passage, wherein the successive locations along the length of the passage are spaced by approximately one-quarter of a propagation wavelength, or an integral multiple thereof, within the passage for a frequency to be passed by the component, wherein one or more of the following conditions are met (1) the central conductor, the conductive structure, and the conductive stubs are monolithic, (2) a cross-sectional dimension of the passage perpendicular to a propagation direction of the radiation along the passage is less than about 1 mm, more preferably less than about 0.5 mm, and most preferably less than about 0.25 mm, (3) more than about 50% of the passage is filled with a gaseous medium, more preferably more than about 70% of the passage is filled with a gaseous medium, and most preferably more than about 90% of the passage is filled with a gaseous medium, (4) at least a portion of the conductive portions of the component are formed by an electrodeposition process, (5) at least a portion of the conductive portions of the component are formed from a plurality of successively deposited layers, (6) at least a portion of the passage has a generally rectangular shape, (7) at least a portion of the central conductor has a generally rectangular shape, (8) the passage extends along a two-dimensional non-linear path, (9) the passage extends along a three-dimensional path, (10) the passage comprises at least one curved region and a side wall of the passage in the curved region has a nominally smaller radius than an opposite side of the passage in the curved region and is provided with a plurality of surface oscillations having smaller radii, (11) the conductive structure is provided with channels at one or more locations where the electrical field at a surface of the conductive structure, if it were there, would have been less than about 20% of its maximum value within the passage, more preferably less than 10% of its maximum value within the passage, even more preferably less than 5% of its maximum value within the passage, and most preferably where the electrical field would have been approximately zero, (12) the conductive structure is provided with patches of a different conductive material at one or more locations where the electrical field at the surface of the conductive structure, if it were there, would have been less than about 20% of its maximum value within the passage more preferably less than about 10% of its maximum value within the passage, even more preferably less than about 5% of its maximum value within the passage, and most preferably where the electrical field would have been approximately zero, (13) mitered corners are used at least some junctions for segments of the passage that meet at angles between 60° and
120°
, and/or (14) the conductive stubs are spaced at an integral multiple of one-quarter the wavelength and bulges on the central conductor or bulges extending from the conductive structure extend into the passage at one or more locations spaced from the conductive stubs by an integral multiple of approximately one-half the wavelength. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40)
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41. A coaxial RF or microwave component that guides or controls radiation, comprising:
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a. at least one RF or microwave radiation entry port in a conductive structure;
b. at least one RF or microwave radiation exit port in the conductive structure;
c. at least one passage substantially bounded on the sides by the conductive structure through which RF or microwave radiation passes when traveling from the at least one entry port to the at least one exit port;
d. a central conductor extending along a length of the at least one passage from the entry port to the exit port; and
e. a branch in the passage down which a branch of the central conductor runs and in which the central conductor shorts against the conductive structure, wherein at least one of the following conditions is met (1) the branch of the central conductor, the conductive structure surrounding the branch, and a location of shorting between the central conductor and the conductive structure are monolithic, (2) at least a portion of the central conductor or the conductive structure comprises material formed from a plurality of successively deposited layers, and/or (3) at least a portion of the central conductor or the conductive structure comprises material formed by a plurality of electrodeposition operations. - View Dependent Claims (42)
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43. An RF or microwave component that guides or controls radiation, comprising:
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a. at least one RF or microwave radiation entry port in a conductive metal structure;
b. at least one RF or microwave radiation exit port in the conductive metal structure;
c. at least one passage substantially bounded on the sides by the conductive metal structure through which RF or microwave energy passes when traveling from the at least one entry port to the at least one exit port; and
wherein at least one the following conditions are met;
(1) at least a portion of the conductive metal structure comprises a metal formed by a plurality of electrodeposition operations, and/or (2) at least a portion of the conductive metal structure comprises a metal formed from a plurality of successively deposited layers. - View Dependent Claims (44, 45)
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46. An RF or microwave component that guides or controls radiation, comprising:
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a. at least one RF or microwave energy entry port in a conductive metal structure; and
b. at least one passage substantially bounded on the sides by the conductive metal structure through which RF or microwave energy passes when traveling from the at least one entry port; and
wherein at least a portion of the metal structure comprises a metal formed by a plurality of electrodeposition operations and/or from a plurality of successively deposited layers. - View Dependent Claims (47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62)
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63. A microminiature RF or microwave coaxial component, comprising an inner conductor that has an axis which is substantially coaxial with an axis an outer conductor wherein the inner and outer conductors are spaced from one another by a dielectric gap wherein a minimum cross-sectional dimension from an inside wall of the outer conductor to an opposing inside wall of the outer conductor is less than about 200 μ
- m.
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64. An RF or microwave component that guides or controls radiation, comprising:
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a. at least one RF or microwave radiation entry port and at least one exit port within a conductive metal structure; and
b. at least one passage substantially bounded on the sides by the conductive metal structure through which RF or microwave energy passes when traveling from the at least one entry port; and
c. at least one branching channel along the at least one passage, wherein the conductive metal structure surrounding the passage and the channel in proximity to a branching region of the channel from the passage is monolithic.
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- 65. An electrical device, comprising a plurality of layers of successively deposited material, wherein the pattern resulting from the depositions provide at least one structure that is usable as an electrical device.
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76. A method of manufacturing an RF device, comprising:
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a. depositing a plurality of adhered layers of material, wherein the deposition of each layer of material comprises, b. selective deposition of at least a first material;
c. deposition of at least a second material; and
d. planarization of at least a portion of the deposited material;
e. removal of at least a portion of the first or second material after deposition of the plurality of layers;
wherein a structural pattern resulting from the deposition and the removal provides at least one structure that is usable as an electrical device.
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78. A method of manufacturing a microdevice, comprising:
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a. depositing a plurality of adhered layers of material, wherein the deposition of each layer of material comprises, i. deposition of at least a first material;
ii. deposition of at least a second material; and
b. removing of at least a portion of the first or second material after deposition of the plurality of layers;
wherein a structure resulting from the deposition and the removal provides at least one structure that can function as (1) a toroidal inductor, (2) a switch, (3) a helical inductor, or (4) an antenna.
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79. An apparatus for manufacturing a microdevice, comprising:
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a. means for depositing a plurality of adhered layers of material, wherein the deposition of each layer of material comprises utilization of, i. a means for selective deposition of at least a first material;
ii. a means for deposition of at least a second material; and
b. means for removing at least a portion of the first or second material after deposition of the plurality of layers;
wherein a structure resulting from use of the means for depositing and the means for removing provides at least one structure that can function as (1) a toroidal inductor, (2) a switch, (3) a helical inductor, or (4) an antenna.
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80. A microtoroidal inductor comprising a plurality of conductive loop elements configured to form at least a portion of a toroidal pattern wherein the toroidal pattern may be construed to have an inner diameter and an outer diameter and wherein at least a portion of the plurality of loops have a larger cross-sectional dimension in proximity to the outer diameter than in proximity to the inner diameter.
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81. A microantenna comprising an antenna that is at least in part separated from a substrate.
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82. The microantenna of claim 90 comprising a plurality of elements that are not located in a common plane.
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83. The microantenna of claim 90 wherein the entire antenna is separated from the substrate by support element that has a cross-sectional dimension that is a substantially smaller than that of the antenna.
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84. A method of manufacturing an RF device, comprising:
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a. depositing a plurality of adhered layers of material, wherein the deposition of each layer of material comprises, i. selective deposition of at least a first material;
ii. deposition of at least a second material; and
iii. planarization of at least a portion of the deposited material;
b. removing at least a portion of the first or second material after deposition of a plurality of layers;
wherein a structural pattern resulting from the deposition and the removal provides at least one structure that is usable as an RF device.
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Specification