Wireless substrate-like sensor
First Claim
1. A wireless substrate-like sensor comprising:
- a substrate-like housing;
a power source adapted to provide power to the sensor;
an image acquisition system adapted to acquire an image of a target;
a processor operably coupled to the image acquisition system to process the image and obtain data relating a position of the target relative to a position of the sensor; and
a wireless communication module coupled to the digital signal processor to wirelessly convey the data to an external device.
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Accused Products
Abstract
A wireless substrate-like sensor is provided to facilitate alignment and calibration of semiconductor processing systems. The wireless substrate-like sensor includes an optical image acquisition system that acquires one or more images of targets placed within the semiconductor processing system. Analysis of images of the targets obtained by the wireless substrate-like sensor provides position and/or orientation information in at least three degrees of freedom. An additional target is affixed to a known location within the semiconductor processing system such that imaging the reference position with the wireless substrate-like sensor allows the measurement and compensation for pick-up errors.
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Citations
43 Claims
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1. A wireless substrate-like sensor comprising:
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a substrate-like housing;
a power source adapted to provide power to the sensor;
an image acquisition system adapted to acquire an image of a target;
a processor operably coupled to the image acquisition system to process the image and obtain data relating a position of the target relative to a position of the sensor; and
a wireless communication module coupled to the digital signal processor to wirelessly convey the data to an external device. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A wireless substrate-like sensor assembly used to perform calibration of a semiconductor processing system, the sensor assembly comprising:
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a wireless substrate-like sensor including;
a processor;
an internal power source; and
an image acquisition system;
an automatic calibration target including;
at least four target indicia, wherein the at least four target indicia are related to one another through a known relationship; and
wherein the automatic calibration target is mountable to at least one station of the system; and
wherein the sensor is adapted to provide location information relative to at least one automatic calibration target in at least two degrees of freedom. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37)
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38. A method for determining position and orientation of a flat target in three dimensions, the method comprising:
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providing at least four reference indicia on the target;
digitizing an image of the target;
identifying the at least four reference indicia in the image of the target; and
solving a system of equations representing the indicia for a system of unknowns representative of the position and orientation based upon identification of the at least four reference indicia.
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39. A wireless substrate-like sensor comprising:
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a substrate-like housing;
a power source adapted to provide power to the sensor;
an image acquisition system adapted to acquire an image of a target; and
a wireless communication module coupled to the image acquisition system to wirelessly convey the image to an external device. - View Dependent Claims (40, 41, 42, 43)
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Specification