Spring loaded bi-stable MEMS switch
First Claim
1. A micro-electro-mechanical system (MEMS) switching assembly, comprising:
- a stable structure;
a switching member including a transverse torsion member having a flexible portion, a leaf spring, and an electrically conductive cantilever having a free end, the leaf spring and cantilever extending from the flexible portion of the torsion member;
a first anchoring member mounting the torsion member to the stable structure; and
a second anchoring member mounting the leaf spring to the stable structure, wherein the leaf spring has a flexible portion between the first and second anchoring members that can be alternately flexed in opposing directions to deflect the cantilever end in the respective opposing directions.
1 Assignment
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Accused Products
Abstract
A MEMS switch assembly comprising a substrate and a resilient switching member is provided. The resilient switching member comprises a transverse torsion member having a flexible portion, and a leaf spring and cantilever that extend from the flexible portion of the torsion member. The switching assembly further comprises a first anchoring member mounting the torsion member to the stable structure, and a second anchoring member mounting the leaf spring to the stable structure. In this manner, the leaf spring has a flexible portion between the first and second anchors that can be alternately flexed in opposing directions to deflect the cantilever end in the respective opposing directions. The leaf spring can exhibit a first stable geometry (e.g., a convex geometry) when flexed in one of the opposite directions, and a second stable geometry (e.g., a concave geometry) when flexed in another of the opposite directions. Thus, the switch can be switched between two stable states using a momentary force and can maintain these two stable states without further expenditure of energy. The cantilever deflects a greater distance than that of the leaf spring, e.g., more than twice as great. Thus, in this case, the unique geometry of the switching member acts as a mechanical amplifier and allows for a large travel distance of the cantilever end, while maintaining reasonable actuation dimensions. The switching assembly can be designed to achieve any one of a variety of switching methodologies. For example, the switching assembly can be arranged as a single pole double throw (SPDT) switch, in which case, the cantilever can make electrical contact between a common terminal and one of two selected terminals, or a single pole single throw (SPST) switch, in which case, the cantilever can alternately electrically couple and decouple two terminals.
45 Citations
44 Claims
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1. A micro-electro-mechanical system (MEMS) switching assembly, comprising:
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a stable structure;
a switching member including a transverse torsion member having a flexible portion, a leaf spring, and an electrically conductive cantilever having a free end, the leaf spring and cantilever extending from the flexible portion of the torsion member;
a first anchoring member mounting the torsion member to the stable structure; and
a second anchoring member mounting the leaf spring to the stable structure, wherein the leaf spring has a flexible portion between the first and second anchoring members that can be alternately flexed in opposing directions to deflect the cantilever end in the respective opposing directions. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A micro-electro-mechanical system (MEMS) switching assembly, comprising:
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a first substrate having a common terminal and a first terminal;
a second substrate having a second terminal;
a resilient switching member including a transverse torsion member having a flexible portion, a leaf spring, and an electrically conductive cantilever having a free end, the leaf spring and cantilever extending from the flexible portion of the torsion member;
a first anchoring member mounting the torsion member to the stable structure; and
a second anchoring member mounting the leaf spring to the stable structure, wherein the leaf spring has a flexible portion between the first and second anchoring members that can be alternately flexed in opposing directions to alternately deflect the cantilever end into electrical conduction with the first and second terminals. - View Dependent Claims (23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37)
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38. A switching member for a micro-electro-mechanical system (MEMS) switch assembly, comprising:
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a transverse torsion member having a flexible portion;
an electrically conductive cantilever extending from the flexible portion of the torsion member, the cantilever having a free end; and
a pair of leaf springs extending from the flexible portion of the torsion member, the leaf springs straddling the cantilever, the pair of leaf springs alternately exhibiting stable first and second geometries when flexed in opposite directions to deflect the cantilever end in the respective opposing directions. - View Dependent Claims (39, 40, 41, 42, 43, 44)
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Specification