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Piano MEMs micromirror

  • US 20030223679A1
  • Filed: 05/27/2003
  • Published: 12/04/2003
  • Est. Priority Date: 05/28/2002
  • Status: Active Grant
First Claim
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1. A micro-electro-mechanical device for pivotally supporting an optical element on a substrate comprising:

  • a platform for supporting the element, the platform including first and second supporting regions each defined by a width and a length, and brace means extending therebetween defined by a width and a length;

    a first torsional hinge, rotatable about a first axis perpendicular to said brace means, and extending between at least one anchor post of the substrate and the platform proximate the brace means;

    wherein the total width of the first torsional hinge and said brace means is less than the width of the first or the second supporting regions, whereby a plurality of platforms pivotable about the first axis are positionable in close proximity with only an air gap between adjacent first supporting regions.

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