Test method
First Claim
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1. A method for determining the nature of pore interconnectivity in a dielectric material comprising the steps of:
- a) depositing a conductive solution on a surface of a dielectric material;
b) making electrical contact with the conductive solution and the side of the dielectric material opposite to the conductive solution;
c) applying a potential to the dielectric material; and
d) measuring a response to the applied potential.
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Abstract
Methods for determining the extent and nature of porosity in dielectric materials, particularly in thin dielectric films, using electrochemical impedance spectroscopy are disclosed. Such methods are useful in the manufacture of integrated circuits having porous dielectric layers.
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11 Claims
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1. A method for determining the nature of pore interconnectivity in a dielectric material comprising the steps of:
- a) depositing a conductive solution on a surface of a dielectric material;
b) making electrical contact with the conductive solution and the side of the dielectric material opposite to the conductive solution;
c) applying a potential to the dielectric material; and
d) measuring a response to the applied potential. - View Dependent Claims (2, 3, 4)
- a) depositing a conductive solution on a surface of a dielectric material;
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5. A method of manufacturing an integrated circuit comprising the steps of:
- a) disposing a dielectric material on an electronic device substrate;
b) curing the dielectric material;
c) depositing a conductive solution on a surface of a dielectric material;
d) making electrical contact with the conductive solution and the side of the dielectric material opposite to the conductive solution;
e) applying a potential to the dielectric material; and
f) measuring the impedance, capacitance or current. - View Dependent Claims (6, 7, 8, 9, 10)
- a) disposing a dielectric material on an electronic device substrate;
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11. An apparatus for manufacturing integrated circuits comprising:
- a) a means for dispensing a conductive solution on a dielectric material on an electronic device substrate;
b) a first electrical contact for contacting the conductive solution;
c) a second electrical contact for contacting the dielectric material opposite to the conductive solution;
d) means for applying a potential; and
e) means for measuring a response to the applied potential.
- a) a means for dispensing a conductive solution on a dielectric material on an electronic device substrate;
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