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Method and apparatus for smoothing surfaces on an atomic scale

  • US 20030224620A1
  • Filed: 05/31/2002
  • Published: 12/04/2003
  • Est. Priority Date: 05/31/2002
  • Status: Abandoned Application
First Claim
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1. An apparatus for smoothing a surface of a material on an atomic scale, the apparatus comprising:

  • a chamber in which the material is disposed; and

    a source which is disposed in the chamber and which provides a beam of particles which impact the surface with a relatively low energy, effective to cause smoothing of the surface with substantially no etching of the surface.

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