Method for compensating for scatter/reflection effects in particle beam lithography

• US 20030228527A1
• Filed: 04/07/2003
• Published: 12/11/2003
• Est. Priority Date: 04/05/2002
• Status: Active Grant

• Current Assignee: Polaris Innovations Limited (Wi-LAN Inc.)
• Original Assignee: Infineon Technologies AG
• Inventors: Erber, Frank, Schonherr, Bernd, Franke, Torsten, Ruhl, Gunther, Lutz, Tarek, Gans, Fritz, Ebi, Christian
• Granted Patent: US 6,953,644 B2
• Time in Patent Office: Days
• US Class Current: 430/5
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: H01J 2237/31769 Proximity effect correction
• CPC Class Codes: H01J 2237/31796 affecting resists
• CPC Class Codes: H01J 37/3175 Projection methods, i.e. transfer substantially complete pattern to substrate
• CPC Class Codes: Y10S 430/143 Electron beam

Abstract

A method for compensating for scatter/reflection effects in particle beam lithography includes the following steps: providing at least one layer of a material that is sensitive to particle beams, using at least one particle beam to write predetermined patterns in a limited area of the material that is sensitive to particle beams, and using at least one particle beam to write at least one frame, which surrounds the limited area, into the material that is sensitive to particle beams so that variations in the background dose within the limited area are less than 30% of the maximum background dose within the limited area. This provides the advantage that a considerably more homogeneous background dose and hence considerably less variation in the CD measure, can be produced within the area that is written to by the particle beam, in a simple and cost-effective manner.

Claims

1. A method for compensating for scatter effects in particle beam lithography, which comprises:

providing at least one layer of a material that is sensitive to particle beams;

using at least one particle beam for writing predetermined patterns in a limited area of the material that is sensitive to particle beams; and

using at least one particle beam for writing at least one frame, surrounding the limited area, into the material that is sensitive to particle beams so that variations in a background dose within the limited area are less than 30% of a maximum background dose within the limited area.

2. The method according to claim 1, wherein:

the particle beam used to write the predetermined patterns is an electron beam; and

the particle beam used to write the frame is an electron beam.

3. The method according to claim 1, wherein the step of writing the frame includes writing the frame at a predetermined distance from the limited area.

4. The method according to claim 3, wherein the step of writing the frame includes writing the frame with an irradiation dose such that the frame can be seen when the material that is sensitive to particle beams is being developed.

5. The method according to claim 1, wherein the step of writing the frame includes writing the frame directly adjacent the limited area.

6. The method according to claim 5, wherein the step of writing the frame includes writing the frame with an irradiation dose such that the frame cannot be seen when the material that is sensitive to particle beams is being developed.

7. The method according to claim 1, wherein the step of writing the frame includes writing the frame to overlap an edge area of the limited area.

8. The method according to claim 7, wherein the step of writing the frame includes writing the frame with an irradiation dose corresponding to a mean background dose within the frame.

9. The method according to claim 1, wherein the step of writing the frame includes writing the frame such that the variations in the background dose within the limited area are less than 20% of the maximum background dose within the limited area.

10. The method according to claim 1, wherein the step of writing the frame includes varying an irradiation dose used to write the frame.

11. The method according to claim 1, wherein the step of writing the frame includes varying an irradiation dose used to write the frame in accordance with adjacent ones of the predetermined patterns.