Method for recipe format parsing

• US 20030229411A1
• Filed: 10/07/2002
• Published: 12/11/2003
• Est. Priority Date: 06/06/2002
• Status: Abandoned Application

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Shen, You-Wei
• Application Number:
  US10/265,272
• Publication Number:
  US 20030229411A1
• Time in Patent Office: Days
• US Class Current: 700/121
• CPC Class Codes: G05B 2219/23275 Use of parser
• CPC Class Codes: G05B 2219/2602 Wafer processing
• CPC Class Codes: G06Q 99/00 Subject matter not provided for in other groups of this subclass
• CPC Class Codes: H01L 21/67276 Production flow monitoring, e.g. for increasing throughput program-control systems per se G05B19/00, e.g. total factory control G05B19/418

Abstract

A method for recipe format parsing. The method comprises the steps of providing a recipe format having a first, second and third level respectively with a first tag, a plurality of second tags and recipe data, the first tag linked to one of the second tags and the second tags linked to the corresponding recipe data, reading the first tag of the first level, reading the second tag to which the first tag is linked, and reading the corresponding recipe data to which the read second tag is linked.

Claims

1. A method for recipe format parsing comprising the steps of:

providing a recipe format having a first, second and third level respectively with a first tag, a plurality of second tags and recipe data, the first tag linked to one of the second tags and the second tags linked to the corresponding recipe data;

reading the first tag of the first level;

reading the second tag to which the first tag is linked; and

reading the corresponding recipe data to which the read second tag is linked.

2. The method as claimed in claim 1, wherein a length of the first tag is one byte.

3. The method as claimed in claim 1, wherein a length of one of the second tags is one byte.

4. The method as claimed in claim 1, wherein three bytes remain unused in the first level.

5. The method as claimed in claim 1, wherein the second level has 9 second tags.

6. The method as claimed in claim 1, wherein the recipe data of the third level comprises recipe header records, recipe process step records, recipe process step records for strip, empty space fill records, recipe process step records for PVD, recipe process step records for CVD, recipe process step records for MAC, recipe process step records for step extension and header for an extension step.

7. The method as claimed in claim 1, wherein a length of the recipe data is 252 bytes.