Use of models in integrated circuit fabrication
First Claim
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1. A method comprising performing pattern dependent modeling and prediction for electrochemical mechanical deposition, chemical vapor deposition of low-K interlayer dielectric, or spin-on of low-K interlayer dielectric.
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Abstract
A method and system are described to reduce process variation as a result of the electrochemical deposition (ECD), also referred to as electrochemical plating (ECP), and chemical mechanical polishing (CMP) processing of films in integrated circuit manufacturing processes. The described methods use process variation and electrical impact to direct the insertion of dummy fill into an integrated circuit.
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Citations
108 Claims
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1. A method comprising
performing pattern dependent modeling and prediction for electrochemical mechanical deposition, chemical vapor deposition of low-K interlayer dielectric, or spin-on of low-K interlayer dielectric.
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2. A method comprising
based on electrical impact analysis and a pattern dependent model of a semiconductor fabrication process, generating a strategy for placement of dummy fill in the process, and using the pattern dependent model and the electrical impact analysis to evaluate the expected results of the dummy fill to be placed, the use of the model and the electrical impact analysis being embedded as part of the generation of the dummy fill placement strategy.
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3. A method comprising
based on an electrical impact analysis and a pattern dependent model of a semiconductor fabrication process, generating a strategy for placement of dummy fill in the process, and using the pattern dependent model and the electrical impact analysis to evaluate the expected results of the dummy fill to be placed, the fabrication process for which the strategy is being generated comprising other than an oxide chemical mechanical polishing process.
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4. A method comprising
based on a pattern dependent model of a semiconductor fabrication process, generating a strategy for placement of dummy fill in the process, and using the pattern dependent model to evaluate the expected results of the dummy fill to be placed, the fabrication process for which the strategy is being generated comprising two or more stages of fabrication.
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8. A method comprising
based on a pattern dependent model of a semiconductor fabrication process, generating a strategy for placement of dummy fill in the process, and using the pattern dependent model to evaluate the expected results of the dummy fill to be placed, the fabrication process for which the strategy is being generated comprising a polishing or planarization process in which more than one material is removed.
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10. A method comprising
operating a server to provide dummy fill generation functions for a semiconductor design, and enabling a user at a client to operate through a web browser to use the dummy fill placement functions.
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16. A method comprising
using a pattern dependent model to analyze an integrated circuit design, applying a dummy fill strategy to the design analyzing the design to which the dummy fill strategy has been applied, adjusting the design based on the analysis, iterating the analyzing and adjusting steps, and certifying that that a integrated circuit manufactured according to the adjusted design will be within predefined physical and electrical parameters.
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23. A method comprising
defining a set of hierarchical cell placements for dummy fill for a semiconductor fabrication process, and reducing a size of an electronic layout file to which dummy fill is added by using the hierarchical cell placements.
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62. A method comprising
using patterned test wafers or test semiconductor devices to calibrate a pattern dependent model with respect to a preselected tool or process recipe, and based on a pattern dependent model of a semiconductor fabrication process, generating a strategy for placement of dummy fill in the process.
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63. A method comprising
generating full-chip pattern dependent models for at least one of the following processes: - electrochemical deposition, electrochemical mechanical deposition, copper chemical mechanical polishing, lithography, shallow trench isolation chemical mechanical polishing, chemical vapor deposition low-K interlayer dielectric, spin-on low-K interlayer dielectric, and
based on the pattern dependent model, generating a strategy for placement of dummy fill in the process.
- electrochemical deposition, electrochemical mechanical deposition, copper chemical mechanical polishing, lithography, shallow trench isolation chemical mechanical polishing, chemical vapor deposition low-K interlayer dielectric, spin-on low-K interlayer dielectric, and
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64. A method comprising
using a calibrated pattern dependent model to map pattern dependent features to wafer-state parameters such as resulting film thickness, film thickness variation, dishing, erosion and electrical parameters such as sheet resistance, resistance, capacitance, crosstalk noise, voltage drop, drive current loss, dielectric constant, and effective dielectric constant, and based on the pattern dependent model, generating a strategy for placement of dummy fill in a fabrication process.
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65. A method comprising
based on a pattern dependent model, generating a strategy for placement of dummy fill in a process, and using a cost function to measure an impact of dummy fill modification on process induced wafer state and electrical parameter variation.
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66. A method comprising
based on a combination of more than one pattern dependent model, generating a strategy for placement of dummy fill in a process, and predicting an impact of the dummy fill generated by the strategy on process variation.
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67. A method comprising
based on a combination of more than one pattern dependent model and cost function, generating a strategy for placement of dummy fill in a process that optimizes full-chip wafer-state and electrical parameters
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68. A method comprising
based on predicted or simulated wafer state and electrical parameters, generating dummy fill rules for use in dummy fill placement in a semiconductor fabrication process.
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72. A method comprising
providing dummy fill functions to generate dummy fill for a semiconductor fabrication process, and using the functions to automatically modify GDS-format electronic layout files for a semiconductor device.
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73. A method comprising
at a server, receiving from a client layout file for a semiconductor device, generating dummy fill modifications to the layout file at the server, and returning the dummy fill modified layout file from the server to the client.
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81. A method comprising
at a web server, providing a service that enables a user to interactively configure a dummy fill application running on the server, and enabling the user to generate dummy fill information using the dummy fill application.
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83. A method comprising
making available to a user on a network a service that enables the user to verify dummy fill information with respect to a semiconductor design and a fabrication process.
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99. A medium bearing information capable of configuring a machine to enable a user to search for and retrieve information comprising sizes of dummy fill objects to be included in semiconductor device designs.
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100. A medium bearing information capable of configuring a machine to enable a user to search for and retrieve information comprising libraries of dummy fill objects or patterns.
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101. A medium bearing information capable of configuring a machine to enable a user to search for and retrieve information comprising libraries of dummy fill rules.
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102. A method comprising
maintaining a library of semiconductor dummy fill information, and making the library available for use in connection with generating dummy fill placement specifications, and updating the library with changed dummy fill information.
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103. A method comprising
storing calibration information with respect to at least one of the following: - process tools, recipes, and flows, and
updating the calibration information to reflect changes in the process tools, recipes or flows. - View Dependent Claims (104, 105)
- process tools, recipes, and flows, and
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106. A method comprising
enabling a user to obtain a dummy fill strategy for a semiconductor design using a single click of a user interface device through a user interface.
Specification