Microscope, particularly a laser scanning microscope with adaptive optical arrangement

• US 20030230710A1
• Filed: 06/13/2003
• Published: 12/18/2003
• Est. Priority Date: 06/15/2002
• Status: Active Grant

• Current Assignee: Carl Zeiss Microscopy GmbH (Carl-Zeiss-Stiftung)
• Original Assignee: CARL Zeiss JENA GmbH (Carl-Zeiss-Stiftung)
• Inventors: Wolleschensky, Ralf, Kempe, Michael
• Granted Patent: US 7,633,053 B2
• Time in Patent Office: Days
• US Class Current: 250/234
• CPC Class Codes: G02B 21/002 Scanning microscopes scanning near field optical microscopes G01Q60/18
• CPC Class Codes: G02B 26/06 for controlling the phase of light G02B26/08 takes precedence , measuring optical phase difference G01J9/00

Abstract

A microscope, particularly a laser scanning microscope, with an adaptive optical device in the microscope beam path, comprising two reflective adaptive elements, at least one of which is constructed as an adaptive optical element, both of which are oriented with their reflector surface vertical to the optical axes of the microscope beam path, and a polarizing beam splitter whose splitter layer is located in the vertex of two orthogonal arms of the microscope beam path or two orthogonal portions of a folded microscope beam path, wherein a first adaptive element is associated with one arm and the other adaptive element is associated with the second arm, and a quarter-wave plate is located in each arm between the beam splitter and reflective adaptive element, and a detection device to which the detection light is directed and which is linked to the adaptive elements by evaluating and adjusting devices.

Claims

1. A microscope, particularly a laser scanning microscope, with an adaptive optical device in the microscope beam path, comprising:

two reflective adaptive elements, at least one of which is constructed as an adaptive optical element, both of which being oriented with their reflector surface vertical to the optical axes of the microscope beam path;

a polarizing beam splitter having a splitter layer which is located in the vertex of two orthogonal arms of the microscope beam path or two orthogonal portions of a folded microscope beam path, wherein a first adaptive element is associated with one arm and the other adaptive element is associated with a second arm, and a quarter-wave plate being located in each arm between the beam splitter and reflective adaptive element, and

a detection device to which the detection light is directed and which is linked to the adaptive elements by evaluating and adjusting devices.

2. The microscope according to claim 1, wherein,

in one arm, the light coming from the illumination source, depending on its polarization state,

passes through the splitter layer and a quarter-wave plate to a first adaptive element, is then reflected back by the reflector surface of the adaptive element to the splitter layer and is deflected to the microscope objective, and/or

is deflected in the direction of a second adaptive element and, after passing through a quarter-wave plate, strikes the second adaptive element, is reflected back by the latter to the splitter layer and passes through the latter to the microscope objective,

in the other arm, the detection light coming from a sample through the microscope objective, depending on its polarization state,

passes through the splitter layer and a quarter-wave plate to the second adaptive element, is then reflected back by the reflector surface of the latter to the splitter layer and is deflected to the detection device, and/or

is deflected by the splitter layer in the direction of the first adaptive element and, after passing through a quarter-wave plate, strikes the first adaptive element, is reflected back by the latter to the splitter layer and passes through the latter to the detection device, and

the detection device has a second polarizing beam splitter and two optoelectronic converters which are coupled with the adaptive elements by an evaluating and adjusting device, wherein, depending on its polarization state, the detection light passes through the beam splitter to the one optoelectronic converter or is deflected by the splitter layer to the other optoelectronic converter.

3. The microscope according to claim 1, wherein pinhole optics for focusing the detection light on a pinhole and a lens for collimating the detection light are provided between the beam splitter and the detection device.

4. A microscope, particularly a laser scanning microscope, with an adaptive optical device in the microscope beam path, comprising:

an adaptive reflective element and a nonadaptive reflective element, both of which being oriented with their reflector surface vertical to the optical axis of the microscope beam path;

a polarizing beam splitter having a splitter layer located in the vertex of two orthogonal arms of the microscope beam path or two orthogonal portions of a microscope beam path which is folded multiple times, wherein the adaptive element is associated with one arm and the nonadaptive element is associated with a second arm, and a quarter-wave plate being located in each arm between the beam splitter and the respective reflective element, and

a detection device to which the detection light is directed and which is linked to the adaptive element via an evaluating and adjusting device.

5. The microscope according to claim 4, wherein

in one arm the light coming from the illumination source, depending on its polarization state,

passes through the splitter layer and a quarter-wave plate to the adaptive element, is reflected back to the splitter layer by the reflector surface of the adaptive element and is deflected by the splitter layer toward the microscope objective, and/or

is deflected by the splitter layer in the direction of the reflective element, is reflected back to the splitter layer by the reflective element after passing through a quarter-wave plate, and passes through the splitter layer to arrive at the microscope objective,

in the other arm, the light coming from a sample through the microscope objective, depending on its polarization state,

passes through the splitter layer and a quarter-wave plate to the reflective element, is reflected back by the latter to the splitter layer and arrives at the detection device, and/or

is deflected by the splitter layer in the direction of the adaptive element and, after passing through a quarter-wave plate, is reflected back by the adaptive element to the splitter layer and arrives at the detection device.

6. The microscope according to claim 4, wherein each adaptive element is positioned in a pupil plane of the microscope beam path, and optics are provided in the beam path between the beam splitter and the microscope objective for imaging the plane of the adaptive elements in a pupil plane of the microscope arrangement.

7. The microscope according to claim 6, said microscope being a laser scanning microscope and wherein the pupil plane is identical to the reflecting surface of the scanning device and the scanning optics, the microscope objective and a tube lens are positioned relative to one another in such a way that a diffraction-limited spot is generated in the sample, which spot is guided over the sample in lateral direction due to the scanning movement.

8. The microscope according to claim 4, wherein mirrors with mirror surfaces that are adjustable in segments, diaphragm mirrors or reflective spatial light modulators are provided as adaptive elements.

9. The microscope according to claim 4, wherein zoom optics are associated with at least one of the adaptive elements and serve to adapt the aperture of this adaptive element to the aperture of the microscope objective.

10. A microscope, particularly a laser scanning microscope, with an adaptive optical device, comprising:

an adaptive concave mirror which is arranged in a pupil plane of the illumination beam path, an optical beam splitter being associated with the adaptive concave mirror in an intermediate image plane and having a transmittive area and a reflective area in a splitter surface, wherein the illumination light is directed initially to the splitter surface and from the reflective area of the latter to the concave mirror, is focused by the concave mirror onto the transmittive area and passes through the latter to the sample; and

/or

an adaptive concave mirror which is arranged in a pupil plane of the detection beam path, an optical beam splitter being associated with the adaptive concave mirror in an intermediate image plane and having a transmittive area and a reflective area in a splitter surface, wherein the detection light is directed initially to the splitter surface and from its reflective area to the concave mirror, is focused by the concave mirror onto the transmittive area and passes through the latter to a detection device; and

evaluating and adjusting devices which are connected to the adaptive element in the illumination beam path and/or to the adaptive element in the detection beam path, wherein the output signals of the detection device are used for adaptive regulation of the wavefront of the illumination light or detection light.

11. The microscope according to claim 10, wherein the detection light coming from the sample is branched off from the microscope beam path by a beam splitter which is provided for this purpose in the microscope beam path.

12. The microscope according to claim 10, said microscope being a laser scanning microscope, wherein a point-scanning device is provided for scanning the sample, and the transmittive areas of the splitter surface are formed as circular or elliptical openings.

13. A microscope according to claim 10, said microscope being a laser scanning microscope, wherein a line-scanning device is provided for scanning the sample, and the transmittive areas of the splitter surface are formed as slit-shaped openings.

14. The laser scanning microscope according to claim 12, wherein the splitter surface is inclined by 45°

relative to the incident radiation.

15. The microscope according to claim 11, wherein a detector is arranged downstream of the light coming from the illumination source and/or the detection light coming from the sample, and the beam component falling through the transmittive area impinges on said detector.

16. The microscope according to claim 11, wherein the adaptive element is coupled with a device for displacement in the direction of the optical axis, said device likewise being connected to the evaluating and adjusting devices, wherein the beam expansion of the illumination light is influenced by the displacement of the adaptive concave mirror as well as by the change in the focal length of the concave mirror surface.

17. The microscope according to claim 10, wherein information about the intensity of the received light signal is available at the outputs of the