Wireless wafer carrier identification and enterprise data synchronization
First Claim
1. A semiconductor fabrication enterprise comprising:
- an enterprise information system;
a transportable WIP carriers having an RF tag containing WIP identifying data; and
, a wireless interrogation device adapted to read WIP identifying data from the RF tag and communicate with the enterprise information system to read WIP data from the enterprise information system corresponding to the WIP identifying data.
1 Assignment
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Accused Products
Abstract
A semiconductor fabrication enterprise includes fabrication equipment, transportable containers for work-in-process and an enterprise information system. The transportable containers have associated radio frequency tags having identification codes uniquely identifying the carriers in the fabrication process. The enterprise information system contains data corresponding to each such identification code. The identification codes are read by a radio frequency interrogation device, and the radio frequency interrogation device carries out transactions with the enterprise data system to transfer the data corresponding to the identification codes to the radio frequency interrogation device. The radio frequency tags may be adapted for read/write functionality allowing for writing data to the radio frequency tags and synchronization of radio frequency tag data and enterprise information system data.
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Citations
25 Claims
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1. A semiconductor fabrication enterprise comprising:
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an enterprise information system;
a transportable WIP carriers having an RF tag containing WIP identifying data; and
,a wireless interrogation device adapted to read WIP identifying data from the RF tag and communicate with the enterprise information system to read WIP data from the enterprise information system corresponding to the WIP identifying data. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A WIP information system for a semiconductor fabrication enterprise comprising:
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a container adapted for the transportation of WIP through a semiconductor fabrication process;
a RF tag having readable memory programmed with a unique identification code, said RF tag being attached to the container;
an enterprise data source including WIP data corresponding to the identification code; and
,an RF interrogation device adapted to read the identification code from the RF tag and communicate the identification code to the enterprise data source in request of the WIP data corresponding to the identification code. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17)
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18. Method for data communication in a semiconductor fabrication enterprise comprising the steps:
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providing a carrier for WIP, the carrier having attached thereto a RF tag;
assigning to the RF tag a unique identification code;
providing an enterprise data source including data corresponding to the identification code;
reading the identification code from the RF tag with a RF interrogation device;
requesting from the enterprise data source the data corresponding to the identification code; and
,providing to the RF interrogation device the data corresponding to the identification code from the enterprise data source. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25)
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Specification