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Method and apparatus for supporting a substrate

  • US 20030233750A1
  • Filed: 03/21/2003
  • Published: 12/25/2003
  • Est. Priority Date: 06/19/2002
  • Status: Active Grant
First Claim
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1. An apparatus for performing operations on at least one surface of an electronic substrate having a first surface and a second surface, the apparatus comprising:

  • a frame;

    a transportation system that moves the substrate through the apparatus;

    a substrate support system, coupled to the frame, having a non-rigid portion that contacts and supports the substrate during an operation on the substrate, wherein the non-rigid portion allows flexure of the substrate before and during the performance of an operation on the substrate; and

    a device coupled to the frame that performs an operation on a surface of the substrate.

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