Method and apparatus for supporting a substrate
First Claim
1. An apparatus for performing operations on at least one surface of an electronic substrate having a first surface and a second surface, the apparatus comprising:
- a frame;
a transportation system that moves the substrate through the apparatus;
a substrate support system, coupled to the frame, having a non-rigid portion that contacts and supports the substrate during an operation on the substrate, wherein the non-rigid portion allows flexure of the substrate before and during the performance of an operation on the substrate; and
a device coupled to the frame that performs an operation on a surface of the substrate.
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Accused Products
Abstract
An apparatus for performing operations on at least one surface of an electronic substrate having a first surface and a second surface includes a frame, a transportation system that moves the substrate through the apparatus, a substrate support system, coupled to the frame, having a non-rigid portion that contacts and supports the substrate during an operation on the substrate, wherein the non-rigid portion allows flexure of the substrate before and during the performance of an operation on the substrate, and a device coupled to the frame that performs an operation on a surface of the substrate.
21 Citations
18 Claims
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1. An apparatus for performing operations on at least one surface of an electronic substrate having a first surface and a second surface, the apparatus comprising:
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a frame;
a transportation system that moves the substrate through the apparatus;
a substrate support system, coupled to the frame, having a non-rigid portion that contacts and supports the substrate during an operation on the substrate, wherein the non-rigid portion allows flexure of the substrate before and during the performance of an operation on the substrate; and
a device coupled to the frame that performs an operation on a surface of the substrate. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method of performing an operation on an electronic substrate, the method comprising:
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loading the substrate into a processing machine;
moving a support system to a position below the electronic substrate;
contacting a side of the substrate with a non-rigid member of the support system, wherein the non-rigid member yields when contacted by the substrate;
performing a manufacturing operation on the substrate; and
removing the substrate from the processing machine. - View Dependent Claims (8, 9, 10, 11, 12)
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13. An apparatus for supporting an electronic substrate during a manufacturing operation, the apparatus comprising:
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a frame;
supporting means, coupled to the frame, for non-rigidly supporting electronic substrates, wherein the means for non-rigidly supporting allow flexure of the electronic substrate before and during the manufacturing operation. - View Dependent Claims (14, 15, 16, 17, 18)
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Specification