Separation microcolumn assembly for a microgas chromatograph and the like
First Claim
Patent Images
1. A separation microcolumn assembly comprising a plurality of connected sections, each of the sections including:
- a substrate having a plurality of closely-spaced, gas-flow microchannels etched therein; and
a cover connected to the substrate to sealingly close the microchannels.
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Abstract
A high-sensitivity, separation microcolumn assembly for a microgas chromatograph and the like is provided. The assembly has an ultra-low mass complete with integrated heaters. The assembly uses multiple zones for temperature control, and microstructures that permit very rapid heating and cooling of the microcolumn.
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Citations
21 Claims
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1. A separation microcolumn assembly comprising a plurality of connected sections, each of the sections including:
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a substrate having a plurality of closely-spaced, gas-flow microchannels etched therein; and
a cover connected to the substrate to sealingly close the microchannels. - View Dependent Claims (2, 3, 4, 5, 6)
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7. An assembly comprising:
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an elongated device; and
a first microstructure having high thermal conductivity for dividing the elongated device into temperature zones and to thermally isolate the zones from each other. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. In a microgas chromatograph, a micromachined, separation microcolumn assembly to separate a gas sample flowing therethrough into separate compounds, the assembly including a plurality of connected sections, each of the sections including:
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a substrate having a plurality of closely-spaced, gas flow microchannels etched therein; and
a cover connected to the substrate to sealingly close the microchannels.
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21. In a microgas chromatograph, a micromachined, separation microcolumn assembly to separate a gas sample flowing therethrough into separate compounds, the assembly comprising:
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a microcolumn; and
a first microstructure having high thermal conductivity for dividing the microcolumn into temperature zones and to thermally isolate the zones from each other.
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Specification