Apparatus and method for mass flow controller with embedded web server
First Claim
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1. A mass flow controller comprising:
- a mass flow sensor configured to produce a mass flow signal representative of a gas flow through the mass flow controller; and
an electronic controller configured to produce a closed loop control signal for an outlet valve based on said mass flow signal, wherein said electronic controller is also configured to operate as a web server.
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Abstract
A mass flow controller includes an electronic controller that provides a web server that allows access to the web server through such interworking networks as the Internet.
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Citations
27 Claims
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1. A mass flow controller comprising:
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a mass flow sensor configured to produce a mass flow signal representative of a gas flow through the mass flow controller; and
an electronic controller configured to produce a closed loop control signal for an outlet valve based on said mass flow signal, wherein said electronic controller is also configured to operate as a web server. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A mass flow controller comprising:
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a mass flow sensor configured to produce a mass flow signal representative of a gas flow through the mass flow controller;
an electronic controller configured to produce a closed loop control signal for an outlet valve based on said mass flow signal, wherein said electronic controller comprises a dual-processor controller that is configured to provide a web server that permits the execution of mass flow controller active diagnostics from a device connected to an interworking network employing active diagnostics code operational with the electronic controller. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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Specification