Device for generating reactive ions

• US 20030234371A1
• Filed: 06/19/2003
• Published: 12/25/2003
• Est. Priority Date: 06/19/2002
• Status: Abandoned Application

• Current Assignee: Byron J. Ziegler
• Original Assignee: Byron J. Ziegler
• Inventors: Ziegler, Byron J.
• Application Number:
  US10/465,729
• Publication Number:
  US 20030234371A1
• Time in Patent Office: Days
• US Class Current: 250/423.00R
• CPC Class Codes: C23C 14/0031 Bombardment of substrates by reactive ion beams
• CPC Class Codes: C23C 14/48 Ion implantation
• CPC Class Codes: C23C 14/54 Controlling or regulating the coating process

Abstract

The invention relates to devices and methods for generating reactive ions in thin layer chemistry vacuum or vapor chamber where the mixture and delivery of gas to an ion source controlled by a controller sensitive to the chemical make up in the vacuum or vapor chamber.

Claims

1. A ion source gas delivery system comprising:

a) A chemical analyzer for measuring residual gas levels;

b) A controller for receiving residual gas levels and sending control signals to

c) A valve which controls the delivery of gas to an ion source.

2. The gas delivery system of claim 1 where:

a) A residual gas levels for a plurality of gasses are measured; and

b) the controller receives a plurality of residual gas level measurements and sends control signals to

c) a plurality of valves for controlling the delivery of a plurality of gases to the ion source.

3. The gas delivery system of claim 2 where one of the gases delivered to the ion source is Florine and another gas delivered to the ion source is an inert gas.

4. The gas delivery system of claim 3 where the inert gas is Helium.

5. The gas delivery system of claim 1 in which

a) the ion source generates a stream of ions, and

b) the controller also can receive information from a multi-substrate drive system which is used by the controller to synchronize the release of ions from the ion source with the appearance of substrates in the path of the ion stream.

6. The gas delivery system of claim 3 where the target of the ion source is a plastic.

7. The gas delivery system of claim 3 where the target of the ion source is a polycarbonate.

8. A method for delivering gas to an ion source including the following steps:

a) measuring the level of residual gas;

b) providing a controller with the measurements of the level of the residual gas;

c) sending control signals from the controller to valve controlling the release of gas to the ion source that affect the level of the measured residual gas.

9. The method of claim 8 where a plurality of residual gas levels are measured.

10. The method of claim 9 where control signals are sent to a plurality of gases that affect the level of the measured residual gases.

11. The method of claim 10 where the ion source is being used to produce a bonding layer on the surface of the plastic.

12. The method of claim 11 where a gas released to the ion source is Florine.

13. The method of claim 11 where a gas released to the ion source is a dilution of Florine.

14. The method of claim 11 where the gas released to the ion source is a dilution of Florine in an inert gas.

15. The method of claim 14 where the inert gas is Helium.

16. A product which at some point in its manufacture at lease some surface of the product was subject to surface treatment by an ion source where the delivery of gas to the ion source is controlled by a controller that receives information from a chemical analyzer that measures the levels of residual gases that are affected by the amount of a particular gas delivered to the ion source.

17. A product of claim 16 for which the treated surface was plastic.

18. A product of claim 16 for which the gas delivered to the ion source contains Florine.

19. A product of claim 16 for which:

a) treated surface was plastic;

b) the gas delivered to the ion source contains Florine.

20. A product of claim 18 for which after the surface was treated with Florine ions another coating where applied to the surface while continuing to be bombarded with Florine ions.