Piezoelectric/electrostrictive film device
First Claim
1. A piezoelectric/electrostrictive film device comprising a substrate comprising ceramics, and a piezoelectric/electrostrictive actuator including a laminate formed by layering at least one lower electrode, at least one piezoelectric/electrostrictive layer sequentially layered on said substrate, said at least one piezoelectric/electrostrictive layer covering an upper surface of said at least one lower electrode and a lower surface of said at least one upper electrode and protruding over edges thereof, characterized in that said protruded portion of said piezoelectric/electrostrictive layer is coupled to said substrate via a coupling member, and flexural displacement of said present device is substantially same as, and resonant frequency of the present device is 3% or more larger than, that of a piezoelectric/electrostrictlve film device comprising same materials and same configuration as the present device but including no coupling member.
1 Assignment
0 Petitions
Accused Products
Abstract
There is provided a piezoelectric/electrostrictive film device having larger resonant frequency while having flexural displacement that is equal to or superior to that of conventional piezoelectric/electrostrictive film device, and being excellent in rapid response. The piezoelectric/electrostrictive film device comprises a substrate comprising ceramics, and a piezoelectric/electrostrictive actuator including a lower electrode, a piezoelectric/electrostrictive layer and an upper electrode that are sequentially layered on the substrate, the piezoelectric/electrostrictive layer covering an upper surface of the lower electrode and a lower surface of the upper electrode and protruding over edges thereof, wherein the protruded portion of the piezoelectric/electrostrictive layer is coupled to the substrate via a coupling member. The present device shows substantially the same flexural displacement, but a larger resonant frequency of 3% or more, when compared with those of a piezoelectric/electrostrictive film device comprising same materials and same configuration as the present device, but without coupling member.
-
Citations
15 Claims
-
1. A piezoelectric/electrostrictive film device comprising a substrate comprising ceramics, and a piezoelectric/electrostrictive actuator including a laminate formed by layering at least one lower electrode, at least one piezoelectric/electrostrictive layer sequentially layered on said substrate, said at least one piezoelectric/electrostrictive layer covering an upper surface of said at least one lower electrode and a lower surface of said at least one upper electrode and protruding over edges thereof,
characterized in that said protruded portion of said piezoelectric/electrostrictive layer is coupled to said substrate via a coupling member, and flexural displacement of said present device is substantially same as, and resonant frequency of the present device is 3% or more larger than, that of a piezoelectric/electrostrictlve film device comprising same materials and same configuration as the present device but including no coupling member.
Specification