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Piezoelectric/electrostrictive film device

  • US 20030234595A1
  • Filed: 06/17/2003
  • Published: 12/25/2003
  • Est. Priority Date: 06/21/2002
  • Status: Active Grant
First Claim
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1. A piezoelectric/electrostrictive film device comprising a substrate comprising ceramics, and a piezoelectric/electrostrictive actuator including a laminate formed by layering at least one lower electrode, at least one piezoelectric/electrostrictive layer sequentially layered on said substrate, said at least one piezoelectric/electrostrictive layer covering an upper surface of said at least one lower electrode and a lower surface of said at least one upper electrode and protruding over edges thereof, characterized in that said protruded portion of said piezoelectric/electrostrictive layer is coupled to said substrate via a coupling member, and flexural displacement of said present device is substantially same as, and resonant frequency of the present device is 3% or more larger than, that of a piezoelectric/electrostrictlve film device comprising same materials and same configuration as the present device but including no coupling member.

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