Surface emitting semiconductor laser and method of fabricating the same
First Claim
1. A surface emitting semiconductor laser comprising:
- a substrate;
a lower semiconductor multilayer mirror of a first conduction type formed on the substrate;
an upper semiconductor multilayer mirror of a second conduction type;
an active region disposed between the lower and upper semiconductor multilayer mirrors;
a current confinement portion arranged between the lower and upper semiconductor multilayer mirrors; and
a metal layer provided on the upper semiconductor multilayer mirror, a mesa structure being formed so as to include at least the upper semiconductor multilayer mirror, the current confinement portion and the metal layer, the mesa structure having a side surface aligned with the metal layer.
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Accused Products
Abstract
A surface emitting semiconductor laser includes a substrate, a lower semiconductor multilayer mirror of a first conduction type formed on the substrate, an upper semiconductor multilayer mirror of a second conduction type, an active region disposed between the lower and upper semiconductor multilayer mirrors, a current confinement portion arranged between the lower and upper semiconductor multilayer mirrors, and a metal layer provided on the upper semiconductor multilayer mirror. A mesa structure is formed so as to include at least the upper semiconductor multilayer mirror, the current confinement portion and the metal layer. The mesa structure has a side surface aligned with the metal layer.
45 Citations
21 Claims
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1. A surface emitting semiconductor laser comprising:
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a substrate;
a lower semiconductor multilayer mirror of a first conduction type formed on the substrate;
an upper semiconductor multilayer mirror of a second conduction type;
an active region disposed between the lower and upper semiconductor multilayer mirrors;
a current confinement portion arranged between the lower and upper semiconductor multilayer mirrors; and
a metal layer provided on the upper semiconductor multilayer mirror, a mesa structure being formed so as to include at least the upper semiconductor multilayer mirror, the current confinement portion and the metal layer, the mesa structure having a side surface aligned with the metal layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A surface emitting semiconductor laser comprising:
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a substrate;
multiple semiconductor layers formed on the substrate, the multiple semiconductor layers including a first reflection mirror of a first conduction type, an active region on the first reflection mirror, at least one current confinement layer partially including an oxidized region, and a second reflection mirror of a second conduction type; and
an electrode having a light emitting window formed on the multiple semiconductor layers, a mesa structure being formed so as to include at least the first reflection mirror, the at least one current confinement layer and the electrode and extending at least from the second reflection mirror to the current confinement layer, the mesa structure having a shape that corresponds to a shape of the electrode. - View Dependent Claims (12, 13, 14, 15)
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16. A method of fabricating a surface emitting semiconductor laser comprising the steps of:
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forming multiple semiconductor layers on a substrate, the multiple semiconductor layers including first and second semiconductor mirrors, a current confinement layer and an active layer;
forming a metal layer on the multiple semiconductor layers;
forming the metal layer into a predetermined shape;
etching the multiple semiconductor layers with the metal layer being used as a mask so that a mesa structure extending at least from the second semiconductor mirror to the current confinement layer is formed; and
exposing the mesa structure to a water vapor atmosphere so as to form an oxidized region that is part of the current confinement layer. - View Dependent Claims (17, 18)
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19. A method of fabricating a surface emitting semiconductor laser comprising the steps of:
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forming multiple semiconductor layers on a substrate, the multiple semiconductor layers including first and second semiconductor mirrors, a current confinement layer and an active layer;
forming a metal layer on the multiple semiconductor layers;
forming an insulating layer on the metal layer;
patterning the insulating layer and the metal layer into a predetermined shape;
anisotropically etching the multiple semiconductor layers with a patterned insulating layer and a patterned metal layer so that a mesa structure extending at least from the second semiconductor mirror to the current confinement layer is formed; and
exposing the mesa structure to a water vapor atmosphere so as to form an oxidized region that is part of the current confinement layer. - View Dependent Claims (20, 21)
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Specification