Low viscosity high resolution patterning material
First Claim
1. A composition, disposed on a surface and polymerizable in response to radiation being incident thereupon, said composition comprising:
- a mono-functional acrylate component;
a poly-functional molecule component; and
an initiator component combined with said mono-functional acrylate component and said poly-functional molecule component to provide a viscosity no greater than 2 cps to preferentially wet said surface forming a contact angle therewith no greater than 75°
, with said initiator component being responsive to said radiation to initiate a free radical reaction to cause said mono-functional acrylate component and said poly-functional molecule component to polymerize and cross-link.
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Abstract
The present invention provides a composition and a method for forming a pattern on a substrate with the composition by forming a cross-linked polymer from the composition upon exposing the same to radiation. The viscosity and wetting properties of the composition are selected to facilitate formation of a layer from a plurality of spaced-apart beads of the material disposed on the substrate. To that end, in one embodiment of the present invention the composition includes a mono-functional acrylate component, a poly-functional molecule component, and an initiator component responsive to the radiation to initiate a free radical reaction to cause the mono-functional acrylate component and the poly-functional molecule component to polymerize and crosslink.
154 Citations
21 Claims
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1. A composition, disposed on a surface and polymerizable in response to radiation being incident thereupon, said composition comprising:
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a mono-functional acrylate component;
a poly-functional molecule component; and
an initiator component combined with said mono-functional acrylate component and said poly-functional molecule component to provide a viscosity no greater than 2 cps to preferentially wet said surface forming a contact angle therewith no greater than 75°
, with said initiator component being responsive to said radiation to initiate a free radical reaction to cause said mono-functional acrylate component and said poly-functional molecule component to polymerize and cross-link. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A polymerizable composition disposed on an organic polymer surface, said composition comprising:
a combination of a plurality of mono-functional acrylate molecules, a plurality of poly-functional molecules; and
a plurality of initiator molecules, with said combination having a viscosity in a range of 1 to 2 cps, and preferentially wets said organic polymer surface forming a contact angle of less than 75°
, while not dissolving more than 500 nm of said organic polymer surface upon being removed one minute after wetting said organic polymer surface and forms a contact, minimizing wetting of an adjacent silylating containing surface, forming a contact angle therewith that is greater than 75°
, with said plurality of initiator molecules being responsive to a pulse of ultraviolet radiation, containing less than 5 J cm-2, to cause said plurality of mono-functional acrylate molecules and said plurality of poly-functional molecules to polymerize and cross-link, defining a cross-linked polymer layer, said composition providing thermal stability to said cross-linked polymer layer when subjected to an atmosphere of 75°
C. for thirty minutes so that a variation in an angle, measured between a nadir of a recess and a sidewall formed therein, is no more than 10%.- View Dependent Claims (10, 11, 12, 13, 14, 15)
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16. A method of forming a pattern on a substrate by exposing a composition disposed on said substrate to radiation, said composition comprising:
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a mono-functional acrylate component;
a poly-functional molecule component; and
an initiator component combined with said mono-functional acrylate component and said poly-functional molecule component to provide a viscosity no greater than 2 cps to preferentially wet said substrate forming a contact angle therewith no greater than 75°
, with said initiator component being responsive to said radiation to initiate a free radical reaction to cause said mono-functional acrylate component and said poly-functional molecule component to polymerize and cross-link. - View Dependent Claims (17, 18, 19, 20)
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21. A composition, polymerizable in response to radiation being incident thereupon, said composition comprising:
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a mono-functional acrylate component;
a poly-functional molecule component; and
an initiator component combined with said mono-functional acrylate component and said poly-functional molecule component forming a mixture having a measured viscosity greater than 10% lower than a predicted viscosity, with said predicted viscosity being obtained by a sum of an inverse value of a theoretical viscosity of said each of said mono-functional acrylate component, said poly-functional molecule component and said initiator component and summing said inverse theoretical viscosities components by their weight fraction of said mixture, with said initiator component being responsive to said radiation to initiate a free radical reaction to cause said mono-functional acrylate component and said poly-functional molecule component to polymerize and cross-link.
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Specification