INTEGRATED DRIVER PROCESS FLOW
First Claim
1. A method of fabricating an integrated device comprising the steps of:
- a. fabricating a front-end portion for each of a plurality of transistors;
b. isolating the front-end portions of the plurality of transistors;
c. fabricating a front-end portion of a diffractive light modulator;
d. isolating the front end portion of the diffractive light modulator;
e. fabricating interconnects for the plurality of transistors;
f. applying an open array mask and wet etch to access the diffractive light modulator; and
g. fabricating a back-end portion of the diffractive light modulator, thereby monolithically coupling the diffractive light modulator and the plurality of transistors.
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Accused Products
Abstract
An integrated device including one or more device drivers and a diffractive light modulator monolithically coupled to the one or more driver circuits. The one or more driver circuits are configured to process received control signals and to transmit the processed control signals to the diffractive light modulator. A method of fabricating the integrated device preferably comprises fabricating a front-end portion for each of a plurality of transistors, isolating the front-end portions of the plurality of transistors, fabricating a front-end portion of a diffractive light modulator, isolating the front end portion of the diffractive light modulator, fabricating interconnects for the plurality of transistors, applying an open array mask and wet etch to access the diffractive light modulator, and fabricating a back-end portion of the diffractive light modulator, thereby monolithically coupling the diffractive light modulator and the plurality of transistors.
99 Citations
20 Claims
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1. A method of fabricating an integrated device comprising the steps of:
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a. fabricating a front-end portion for each of a plurality of transistors;
b. isolating the front-end portions of the plurality of transistors;
c. fabricating a front-end portion of a diffractive light modulator;
d. isolating the front end portion of the diffractive light modulator;
e. fabricating interconnects for the plurality of transistors;
f. applying an open array mask and wet etch to access the diffractive light modulator; and
g. fabricating a back-end portion of the diffractive light modulator, thereby monolithically coupling the diffractive light modulator and the plurality of transistors. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. An integrated device comprising:
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a. means for performing high temperature processing steps to fabricate a front-end portion of each of a plurality of transistors on a substrate;
b. means for isolating the front-end portions of the plurality of transistors;
c. means for performing high temperature processing steps to fabricate a front-end portion of a diffractive light modulator coupled to the substrate;
d. means for isolating the front-end portions of the diffractive light modulator;
e. means for performing low temperature processing steps to fabricate one or more metal layers which form interconnects for the plurality of transistors, thereby forming one or more driver devices;
f. means for applying an open array mask and wet etch to remove layers above the diffractive light modulator; and
g. means for performing low temperature processing steps to fabricate a back-end portion of the diffractive light modulator, thereby monolithically coupling the diffractive light modulator and the plurality of transistors.
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14. An integrated device comprising:
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a. one or more device drivers; and
b. a diffractive light modulator monolithically coupled to the one or more driver circuits, wherein the one or more driver circuits are configured to transmit control signals to the diffractive light modulator. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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Specification