Reducing the actuation voltage of microelectromechanical system switches

• US 20040000696A1
• Filed: 06/28/2002
• Published: 01/01/2004
• Est. Priority Date: 08/30/2001
• Status: Active Grant

• Current Assignee: Intel Corporation
• Original Assignee: Intel Corporation
• Inventors: Ma, Qing, Rao, Valluri, Chou, Tsung-Kuan Allen
• Granted Patent: US 7,358,579 B2
• Time in Patent Office: Days
• US Class Current: 257/415
• CPC Class Codes: B81B 2201/014 having a cantilever fixed on one side connected to one or more dimples
• CPC Class Codes: B81B 2201/0271 Resonators; ultrasonic resonators
• CPC Class Codes: B81B 2203/0118 Cantilevers
• CPC Class Codes: B81B 2203/0353 Holes
• CPC Class Codes: B81B 2203/04 Electrodes
• CPC Class Codes: B81B 3/007 For controlling stiffness, e.g. ribs
• CPC Class Codes: B81C 2201/056 Releasing structures at the end of the manufacturing process
• CPC Class Codes: H01H 1/20 Bridging contacts for circuit breakers H01H73/045
• CPC Class Codes: H01H 2001/0084 with perpendicular movement of the movable contact relative to the substrate
• CPC Class Codes: H01H 2059/0036 Movable armature with higher resonant frequency for faster switching
• CPC Class Codes: H01H 2059/0063 with stepped actuation, e.g. actuation voltages applied to different sets of electrodes at different times or different spring constants during actuation
• CPC Class Codes: H01H 59/0009 making use of micromechanics

Claims