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Micro-support structures

  • US 20040001264A1
  • Filed: 06/28/2002
  • Published: 01/01/2004
  • Est. Priority Date: 06/28/2002
  • Status: Active Grant
First Claim
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1. A micro-device comprising an elongated micro-structure coupled to a substrate by at least one end through a securing region comprising sets of securing features arranged laterally along the at least one end.

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