Method for roll-to-roll deposition of optically transparent and high conductivity metallic thin films
First Claim
1. A method for forming a composite film comprising:
- (a) providing a flexible plastic substrate;
(b) depositing a multi-layered conductive metallic film continuously on the flexible plastic substrate by a thin-film deposition technique; and
(c) collecting the composite film in continuous rolls.
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Accused Products
Abstract
Methods for roll-to-roll deposition of optically transparent and high conductivity metallic thin films are disclosed. In general, a method according to the present invention comprises: (1) providing a flexible plastic substrate; (2) depositing a multi-layered conductive metallic film on the flexible plastic substrate by a thin-film deposition technique to form a composite film; and (3) collecting the composite film in continuous rolls. Typically, the thin conductive metallic film is an InCeO—Ag—InCeO film. Typically, the thin-film deposition technique is DC magnetron sputtering. Another aspect of the invention is a composite film produced by a method according to the present invention. Still another aspect of the invention is a composite film comprising InCeO—Ag—InCeO film formed on a flexible plastic substrate, wherein the composite film has a combination of properties including: transmittance of at least 90% throughout the visible region; an electrical resistance of no greater than about 10 Ω/square; a root-mean-square roughness of no greater than about 2.5 nm; and an interlayer adhesion between the InCeO/Ag/InCeO metallic film and the remainder of the composite film that is sufficiently great to survive a 180° peel adhesion test.
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Citations
131 Claims
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1. A method for forming a composite film comprising:
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(a) providing a flexible plastic substrate;
(b) depositing a multi-layered conductive metallic film continuously on the flexible plastic substrate by a thin-film deposition technique; and
(c) collecting the composite film in continuous rolls. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83, 84, 85, 86, 87, 88, 89, 90, 91, 92, 93, 94, 95, 96, 97, 98, 99, 100, 101, 102, 103, 104, 105, 106, 107, 108, 109, 110, 111, 112, 113, 114, 115, 116, 117, 118, 119, 120, 121, 122)
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123. A composite film comprising an InCeO/Ag/InCeO metallic film coated or deposited on a flexible plastic substrate, wherein the composite film:
- (1) has a transmittance of at least 80% in the visible region;
(2) has an electrical resistance of no greater than about 20 Ω
/square;
(3) has a root-mean-square roughness of no greater than about 5 nm; and
(4) has an interlayer adhesion between the InCeO/Ag/InCeO metallic film and other elements of the composite film that is sufficiently great to survive a 180°
peel adhesion test. - View Dependent Claims (124, 125, 126, 127, 128, 129, 130, 131)
- (1) has a transmittance of at least 80% in the visible region;
Specification