Carbon nanotube array based sensor
First Claim
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1. A sensor system, comprising:
- a first electrode with an array of carbon nanotubes, a second electrode, said first electrode with an array of carbon nonotubes and said second electrode positioned to produce an air gap between said first electrode with an array of carbon nonotubes and said second electrode, and means for sensing changes in electrical capacitance between said first electrode with an array of carbon nonotubes and said second electrode.
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Abstract
A sensor system comprising a first electrode with an array of carbon nanotubes and a second electrode. The first electrode with an array of carbon nonotubes and the second electrode are positioned to produce an air gap between the first electrode with an array of carbon nonotubes and the second electrode. A means is provided for sensing changes in electrical capacitance between said first electrode with an array of carbon nonotubes and said second electrode.
41 Citations
40 Claims
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1. A sensor system, comprising:
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a first electrode with an array of carbon nanotubes, a second electrode, said first electrode with an array of carbon nonotubes and said second electrode positioned to produce an air gap between said first electrode with an array of carbon nonotubes and said second electrode, and means for sensing changes in electrical capacitance between said first electrode with an array of carbon nonotubes and said second electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 38, 39, 40)
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21. A method of producing a sensor, comprising the steps of:
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providing a first electrode, producing an array of carbon nanotubes extending from said first electrode, providing a second electrode, positioning said first electrode with said array of carbon nanotubes and said second electrode in a position where there is an air gap between first electrode with said array of carbon nanotubes and said second electrode, and providing a system for sensing changes in electrical capacitance between said first electrode with said array of carbon nanotubes and said second electrode. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37)
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Specification