Device and method for electronic device test
First Claim
1. A test device for testing a plurality of electronic devices formed on a wafer, comprising:
- a pattern supply part for supplying a test pattern to each of the plurality of electronic devices;
a measurement part for measuring data indicating operation of each of the electronic devices generated from the test pattern; and
a judgment part for judging acceptability of other electronic devices based on the data of at least one of the electronic devices among the plurality of electronic devices.
1 Assignment
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Accused Products
Abstract
A test device tests acceptability of a plurality of electronic devices formed on a wafer. The test device includes: a pattern supply part for supplying test patterns to each of the plurality of electronic devices; a power supply for applying power supply voltage to each of the plurality of electronic devices; a measurement part for measuring the data indicating the operations of each of the electronic devices generated by the test patterns; a calculation part for calculating the reference values for judging the acceptability of each of the electronic devices; and a judgment part for judging the acceptability of each of the electronic devices.
14 Citations
18 Claims
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1. A test device for testing a plurality of electronic devices formed on a wafer, comprising:
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a pattern supply part for supplying a test pattern to each of the plurality of electronic devices;
a measurement part for measuring data indicating operation of each of the electronic devices generated from the test pattern; and
a judgment part for judging acceptability of other electronic devices based on the data of at least one of the electronic devices among the plurality of electronic devices. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A test method for testing a plurality of electronic devices formed on a wafer, comprising steps of:
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inputting a test pattern to each of the plurality of electronic devices;
measuring data indicating operation of each of the electronic devices generated from the test pattern; and
judging acceptability of other electronic devices based on the data of at least one of the electronic devices among the plurality of electronic devices. - View Dependent Claims (15, 16, 17, 18)
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Specification