Electrostatic drive mirror apparatus

• US 20040005114A1
• Filed: 07/01/2003
• Published: 01/08/2004
• Est. Priority Date: 07/03/2002
• Status: Abandoned Application

• Current Assignee: Olympus Optical Company Ltd. (Olympus Corporation)
• Original Assignee: Olympus Optical Company Ltd. (Olympus Corporation)
• Inventors: Sakai, Yohei, Matsumoto, Kazuya, Fujita, Hiromasa, Ogata, Masanori
• Application Number:
  US10/609,606
• Publication Number:
  US 20040005114A1
• Time in Patent Office: Days
• US Class Current: 385/18
• CPC Class Codes: G02B 6/3512 the optical element being reflective, e.g. mirror
• CPC Class Codes: G02B 6/3548 1xN switch, i.e. one input and a selectable single output of N possible outputs
• CPC Class Codes: G02B 6/3556 NxM switch, i.e. regular arrays of switches elements of matrix type constellation
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841

Abstract

Disclosed herein is an electrostatic drive mirror apparatus including: electrostatic drive mirrors to be variably operated by electrostatic drive; an electrostatic mirror drive section formed on one semiconductor substrate, including at least mirror drive electrodes for driving the electrostatic drive mirrors and signal wirings for applying drive voltage on the mirror drive electrodes; a variable voltage source for supplying voltage from an external source to the electrostatic mirror drive section; drive switches for controlling and driving applied voltages from the variable voltage source to the electrostatic mirror drive section; holding capacitors for retaining the applied voltage to the electrostatic mirror drive section; and a control section for controlling at least the drive switches and the variable voltage source.

Claims

1. An electrostatic drive mirror apparatus comprising:

electrostatic drive mirrors to be variably operated by electrostatic drive;

an electrostatic mirror drive section formed on one semiconductor substrate, including at least mirror drive electrodes for driving the electrostatic drive mirrors and signal wirings for applying drive voltage on the mirror drive electrodes;

a variable voltage source for supplying voltage from an external source to the electrostatic mirror drive section;

drive switches for controlling and driving applied voltages from said variable voltage source to said electrostatic mirror drive section;

holding capacitors for retaining the applied voltage to said electrostatic mirror drive section; and

a control section for controlling at least said drive switches and said variable voltage source.

2. The electrostatic drive mirror apparatus according to claim 1, wherein said drive switches, said holding capacitors and said control section are provided externally to said electrostatic mirror drive section.

3. The electrostatic drive mirror apparatus according to claim 2, wherein said drive switches, said holding capacitors and said control section are respectively formed a discrete member.

4. The electrostatic drive mirror apparatus according to claim 2, wherein said drive switches, said holding capacitors, and at least a part of said control section are disposed on the same one semiconductor substrate.

5. The electrostatic drive mirror apparatus according to claim 1, wherein said drive switches and said control section are provided externally to said electrostatic mirror drive section, and wherein said holding capacitors are disposed on the same one semiconductor substrate with said electrostatic mirror drive section.

6. The electrostatic drive mirror apparatus according to claim 5, wherein said drive switches and said control section are respectively formed as a discrete member.

7. The electrostatic drive mirror apparatus according to claim 5, wherein said drive switches and at least a part of said control section are disposed on the same one semiconductor substrate.

8. The electrostatic drive mirror apparatus according to claim 1, wherein said drive switches and said holding capacitors are disposed on the same one semiconductor substrate with said electrostatic mirror drive section, and wherein said control section is provided externally to said electrostatic mirror drive section.

9. The electrostatic drive mirror apparatus according to claim 1, wherein said drive switches and said holding capacitors and at least a part of said control section are disposed on the same one semiconductor substrate with said electrostatic mirror drive section.

10. The electrostatic drive mirror apparatus according to any one of claims 5 to 9, wherein said holding capacitors are disposed underneath said signal wirings of said electrostatic mirror drive section.

11. The electrostatic drive mirror apparatus according to any one of claims 5 to 9, wherein said holding capacitors are disposed underneath said mirror drive electrodes of said electrostatic mirror drive section.

12. The electrostatic drive mirror apparatus according to any one of claims 1 to 9, further comprising:

a control logic circuit having a function for effecting control to close said drive switches all together;

a discharging switch for discharging accumulated charges of said holding capacitors; and

a limiting resistor for limiting discharging current.

13. The electrostatic drive mirror apparatus according to claim 10, further comprising:

a control logic circuit having a function for effecting control to close said drive switches all together;

a discharging switch for discharging accumulated charges of said holding capacitors; and

a limiting resistor for limiting discharging current.

14. The electrostatic drive mirror apparatus according to claim 11, further comprising:

a control logic circuit having a function for effecting control to close said drive switches all together;

a discharging switch for discharging accumulated charges of said holding capacitors; and

a limiting resistor for limiting discharging current.

15. An electrostatic drive mirror apparatus comprising a plurality of units, each unit comprising the electrostatic drive mirror apparatus according to any one of claims 1 to 9.

16. An electrostatic drive mirror apparatus comprising a plurality of units, each unit comprising the electrostatic drive mirror apparatus according to claim 10.

17. An electrostatic drive mirror apparatus comprising a plurality of units, each unit comprising the electrostatic drive mirror apparatus according to claim 11.

18. An electrostatic drive mirror apparatus comprising a plurality of units, each unit comprising the electrostatic drive mirror apparatus according to claim 12.

19. An electrostatic drive mirror apparatus comprising a plurality of units, each unit comprising the electrostatic drive mirror apparatus according to claim 13.

20. An electrostatic drive mirror apparatus comprising a plurality of units, each unit comprising the electrostatic drive mirror apparatus according to claim 14.