Chemical reactor templates: sacrificial layer fabrication and template use
First Claim
1. A chemical reactor template having at least two intersecting channel-like voids substantially parallel to the major axis of said template.
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Accused Products
Abstract
The invention relates to chemical reactor templates having channel-like voids parallel to the template'"'"'s major axis. The channel-like voids may have either micro-scale or nano-scale cross sectional areas. The chemical reactor templates may be used to produce micro- and nano-scale filaments and particles which have a variety of uses. In some embodiments a chemical reactor template of the invention have at least two intersecting channel-like voids substantially parallel to the major axis of said template. The invention also relates to methods for manufacturing a chemical reactor template using sacrificial layers. The chemical reactor templates of the invention may be fabricated to have multiple arrays of channel-like structures as well as vertical elements to provide access to act as contacts for the channel-like voids and materials formed within the template. The invention relates to methods for producing filaments and particles using a chemical reactor template. The filaments or particles are formed within the channel-like void to produce a filament within the channel-like void and may be extruded from the chemical reactor template. Using the chemical reactor templates one can fabricate a wide variety of devices having at least one contact region between a first and second material system over a substrate. Another aspect of the invention is the filaments made using a chemical reactor template of the invention. Accordingly the invention relates to an oriented filament has a nano- or micro-scale cross-sectional area and is prepared within a channel having a nano- or micro-scale cross-section.
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Citations
65 Claims
- 1. A chemical reactor template having at least two intersecting channel-like voids substantially parallel to the major axis of said template.
- 11. A chemical reactor template having at least one nano-scale channel-like void substantially parallel to the major axis of said template.
- 14. A chemical reactor template having at least one micro-scale channel-like void substantially parallel to the major axis of said template.
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19. A method for manufacturing a chemical reactor template comprising the steps of:
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applying a sacrificial layer in a predetermined pattern on a substrate;
applying a capping layer such that the sacrificial layer is disposed between the capping layer and said substrate forming a chemical reactor template; and
removing said sacrificial layer to a create a channel-like void within the chemical reactor substrate, the channel-like void being substantially parallel to the substrate. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26)
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27. A method for manufacturing a chemical reactor template comprising the steps of:
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a. applying a first sacrificial layer in a predetermined pattern on a substrate;
b. applying a first capping layer such that the first sacrificial layer is disposed between the capping layer and said substrate;
c. applying a subsequent sacrificial layer in a predetermined pattern on the previously applied capping layer;
d. applying a subsequent capping layer such that the subsequent sacrificial layer is disposed between the subsequent capping layer and the previously applied capping layer;
e. optionally repeating steps (c) and (d). f. removing the first and subsequent sacrificial layers to create channel-like voids within the chemical reactor template, the channel-like voids being substantially parallel to the substrate. - View Dependent Claims (28, 29, 30, 31, 32)
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33. A method for producing a filament using a chemical reactor template comprising the steps of:
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introducing at least one monomer into a chemical reactor template having at least one channel-like void substantially parallel to the major axis of the template, and polymerizing said monomer within the channel-like void to produce a filament within the channel-like void. - View Dependent Claims (34, 35, 36)
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37. A method for producing a semiconductor, dielectric, metal or semi-metal filament using a chemical reactor template comprising the steps of:
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introducing at least one precursor of a semiconductor, dielectric, metal or semi-metal into a chemical reactor template having at least one channel-like void substantially parallel to the major axis of the template, and reacting the precursor within the channel-like void to produce a semiconductor, dielectric, metal or semi-metal filament within the channel-like void. - View Dependent Claims (38, 39, 40, 41)
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42. A method for producing a filament using a chemical reactor template comprising the steps of:
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introducing at least one monomer into a chemical reactor template having at least one channel-like void substantially parallel to the major axis of the template, and polymerizing said monomer within the channel-like void to extrude a filament from the channel-like void. - View Dependent Claims (43)
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44. A method for producing a filament using a chemical reactor template comprising the steps of:
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introducing at least one monomer into a chemical reactor template having at least one channel-like void substantially parallel to the major axis of the template, polymerizing said monomer within the channel-like void to produce a filament within the channel-like void, and extruding the filament from the chemical reactor template. - View Dependent Claims (45)
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46. A method for producing a filament using a chemical reactor template comprising the steps of:
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introducing at least one monomer into a chemical reactor template having at least one channel-like void substantially parallel to the major axis of the template, polymerizing said monomer within the channel-like void to produce a filament within the channel-like void, and removing a portion of the chemical reactor template to expose at least a portion of the filament within the channel-like void. - View Dependent Claims (47, 48)
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49. A method for producing at least one contact region between a first and second material system over a substrate comprising the steps of:
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forming a first material system on a first region of the substrate;
forming a second material system on a second region of the substrate;
applying a sacrificial layer in a predetermined pattern on the substrate such that a portion of the sacrificial layer overlies at least a portion of the first material system and at least a portion of the second material system;
applying a capping layer such that the sacrificial layer is disposed between the capping layer and said substrate forming a chemical reactor template;
removing a sacrificial layer to a create a channel-like void within the chemical reactor template, the channel-like void being substantially parallel to the substrate;
introducing at least one monomer into said channel-like void; and
polymerizing said monomer within the channel-like void to produce a conductive or semi-conductive filament within the channel-like void, wherein said filament is in contact with the first and second material systems. - View Dependent Claims (50, 51, 52, 65)
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53. A method for producing a particle using a chemical reactor template comprising the steps of:
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introducing at least one monomer into a chemical reactor template having at least one channel-like void substantially parallel to the major axis of the template, and polymerizing said monomer within the channel-like void to form a particle within the channel-like void. - View Dependent Claims (54)
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- 55. An oriented polymer filament having a nano-scale cross-sectional area prepared by polymerizing a monomer or comonomer within a channel having a nano-scale cross-section.
- 58. An oriented polymer filament having a micro-scale cross-sectional area prepared by polymerizing a monomer or comonomer within a channel having a nano-scale cross-section.
- 61. An oriented filament having a nano-scale cross-sectional area prepared by polymerizing a monomer or comonomers with a channel having a nano-scale cross-section to form a polymer and decomposing the polymer within the channel to form a filament.
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63. A method for producing a filament using a chemical reactor template comprising the steps of:
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introducing at least one monomer into a chemical reactor template having at least two channel-like voids substantially parallel to the major axis of the template, and polymerizing said monomer within the channel-like voids to extrude a filament from the channel-like void to form a weave.
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64. A method for producing a filament using a chemical reactor template comprising the steps of:
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introducing at least one monomer into a chemical reactor template having at least two channel-like voids substantially parallel to the major axis of the template, polymerizing said monomer within the channel-like voids to produce a filament within the channel-like void, and extruding the filament from the chemical reactor template to form a weave.
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Specification