Sensor element for detecting a physical measuring variable between bodies exposed to high tribological strain
First Claim
1. A sensor element for detecting a physical measurement variable such as a pressure, a temperature, a capacitance, or a gap width between two bodies (10, 20) that move in relation to each other during operation and experience high tribological stress, wherein in certain areas between the surfaces of the bodies (10, 20) that move in relation to each other, in a surface region of at least one of the bodies (10), a sensitive layer (13, 30) is provided, which is separated from the body (10) by an insulation layer (12), characterized in that the sensitive layer (13, 30) is provided with a covering layer (14).
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Abstract
The invention proposes sensor elements (5) for detecting a physical measurement variable such as a pressure, a temperature, a gap width, or a capacitance between two bodies (10, 20) that move in relation to each other during operation and experience high tribological stress. In certain areas between the surfaces of the bodies (10, 20) that move in relation to each other, in a surface region of at least one of the bodies (10), a sensitive layer (13, 30), in particular a sensor segment (13), is provided, which is separated from the body (10) by an insulation layer (12) and has a covering layer (14) in a first embodiment. In an alternative embodiment, a surface region of at least one of the two bodies (10) has a recess (23) in which the sensor surface (13) is disposed on the insulation layer (12). In a third embodiment, the sensor surface (13) has a length of 10 μm to 5 mm, a width of less than 5 μm, and a thickness of less than 200 nm.
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24 Claims
- 1. A sensor element for detecting a physical measurement variable such as a pressure, a temperature, a capacitance, or a gap width between two bodies (10, 20) that move in relation to each other during operation and experience high tribological stress, wherein in certain areas between the surfaces of the bodies (10, 20) that move in relation to each other, in a surface region of at least one of the bodies (10), a sensitive layer (13, 30) is provided, which is separated from the body (10) by an insulation layer (12), characterized in that the sensitive layer (13, 30) is provided with a covering layer (14).
Specification