Tuning fork vibrator, vibrating gyroscope using the same, electronic apparatus using the same, and manufacturing method of the same
First Claim
Patent Images
1. A tuning fork vibrator comprising:
- a plate-shaped vibration unit having a first principal surface and a second principal surface;
a base provided at one end of the second principal surface of the vibration unit in a longitudinal direction thereof;
wherein at least one slit for dividing the vibration unit into at least two legs along the longitudinal direction symmetrically in a width direction of the vibration unit is provided in the vibration unit; and
the at least one slit is arranged to include a portion of the base in proximity to the vibration unit.
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Accused Products
Abstract
A tuning fork vibrator includes a long plate-shaped vibration unit having a first principal surface and a second principal surface, a base disposed at one end of the second principal surface of the vibration unit in the longitudinal direction, and a slit for dividing the vibration unit into two legs defining a tuning fork along the longitudinal direction symmetrically in the width direction of the vibration unit. The slit is formed so as to include a portion of the base in the vicinity to the vibration unit.
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Citations
24 Claims
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1. A tuning fork vibrator comprising:
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a plate-shaped vibration unit having a first principal surface and a second principal surface;
a base provided at one end of the second principal surface of the vibration unit in a longitudinal direction thereof;
whereinat least one slit for dividing the vibration unit into at least two legs along the longitudinal direction symmetrically in a width direction of the vibration unit is provided in the vibration unit; and
the at least one slit is arranged to include a portion of the base in proximity to the vibration unit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 17)
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11. A vibrating gyroscope comprising:
a tuning fork vibrator having two legs defined by piezoelectric members which are polarized in opposite directions of thickness which are bonded to each other between a first principal surface and a second principal surface, so as to have in a tuning fork shape with one fixed end;
whereintwo electrodes divided in a width direction of the two electrodes are provided on a first principal surface of the respective two legs and an electrode is provided on a second principal surface of the respective two legs;
among four electrodes provided on the first principal surface of the respective two legs, two electrodes that are disposed inside-to-inside or outside-to-outside are connected together to define a driving electrode, and the remaining two electrodes define a detection electrode and a feedback electrode; and
all of the electrodes provided on the second principal surfaces of the two legs are connected together, and are connected to a reference voltage or are floating. - View Dependent Claims (12)
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13. A vibrating gyroscope comprising:
a tuning fork vibrator having two legs defined by a non-piezoelectric element and a piezoelectric member bonded together, the piezoelectric member being polarized in the thickness direction thereof and having two electrodes divided in the width direction on a first principal surface and an electrode on a second principal surface thereof, so as to have a first principal surface and a second principal surface, respectively, and to have a tuning fork shape having one fixed end;
whereinfour electrodes being provided on a first principal surface of the respective two legs, two of the four electrodes which are disposed inside-to-inside or outside-to-outside are connected together to define a driving electrode and the remaining two electrodes define a detection electrode and a feedback electrode; and
all of the electrodes provided on the second principal surfaces of the two legs are further connected together and are connected to a reference voltage or are floating. - View Dependent Claims (14)
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15. A vibrating gyroscope comprising:
a tuning fork vibrator including two legs including a non-piezoelectric material and arranged to have a tuning fork shape having one fixed end;
whereinpiezoelectric elements polarized in a thickness direction are provided on a first principal surface of the respective two legs, each of the piezoelectric elements including a lower electrode, a piezoelectric layer provided on the lower electrode, and two upper electrodes provided on the piezoelectric layer and divided in the width direction of the legs; and
four upper electrodes including two electrodes that are arranged inside-to-inside or outside-to-outside and are connected together to define a driving electrode and the remaining two electrodes define a detection electrode and a feedback electrode, and all of the lower electrodes are connected together and are connected to a reference voltage or are floating. - View Dependent Claims (16)
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18. A manufacturing method of a tuning fork vibrator comprising the steps of:
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forming at least one deletion portion having a predetermined length, width, and depth and at least one non-deletion portion arranged adjacent to the deletion portion in the width direction thereof by scraping a second principal surface of a mother substrate having first and second principal surfaces;
forming a first slit for completely dividing the deletion portion along width directions of the deletion portion and the non-deletion portion from the first principal surface of the mother substrate; and
forming second slits for cutting the mother substrate, one of the second slits extends in the width direction and another of the second slits extends in the longitudinal direction of the deletion portion and the non-deletion portion, so as to define a block with a substantially rectangular shape that is longer in the width direction of the deletion portion and the non-deletion portion and including one portion of the deletion portion and one portion of the non-deletion portion;
whereinthe first slit is arranged in the longitudinal direction of the block such that the block is symmetrical in the width direction thereof.
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19. A manufacturing method of a tuning fork vibrator comprising the steps of:
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forming at least one first slit on a mother substrate having first and second principal surfaces from the first principal surface of the mother substrate, the at least one first slit having a first depth less than the thickness of the mother substrate;
forming second slits on the mother substrate from the first principal surface thereof, one of the second slits extends along the longitudinal direction of the first slit, another of the second slits extends along a direction that is substantially perpendicular thereto, such that at least one first slit is included within a substantially rectangular area formed in the mother substrate, the substantially rectangular area being longer in the longitudinal direction of the first slit, the second slits having a second depth less than the thickness of the mother substrate and greater than the first depth;
forming a deletion portion from the second principal surface of the mother substrate by cutting a portion corresponding to one end in the longitudinal direction of a portion of the substantially rectangular area in plan view formed by the second slits until the first slit is completely exposed; and
deleting part of the mother substrate having no deletion portion formed thereon from the first principal surface of the mother substrate until the second slits are completely exposed;
whereinthe first slit is provided in the longitudinal direction of the portion of the substantially rectangular area such that the portion of the substantially rectangular area is symmetrical in the width direction thereof.
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20. A manufacturing method of a tuning fork vibrator comprising the steps of:
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bonding at least one plate-shaped base member on a second principal surface of a mother substrate having first and second principal surfaces, the base member having a predetermined length, width, and thickness;
forming a first slit for completely dividing the mother substrate from the first principal surface of the mother substrate along the width direction of the base member; and
forming second slits for cutting the mother substrate and the base member in directions of the base member, one of the second slits in the width direction and another of the second slits in the longitudinal direction, so as to have a block with a substantially rectangular shape in the width direction of the base member, the block including one piece of only the base member and one piece of a portion of the mother substrate to which the base member is bonded;
whereinthe first slit is provided in the longitudinal direction of the block such that the block is symmetrical in the width direction thereof.
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21. A manufacturing method of a tuning fork vibrator comprising the steps of:
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bonding a first principal surface of a base mother substrate having first and second principal surfaces and a recess or a through-hole with a substantially rectangular shape formed therein on a second principal surface of a mother substrate having first and second principal surfaces;
forming a first slit for completely dividing the mother substrate from the first principal surface of the mother substrate; and
forming a second slit for completely dividing the mother substrate and the base mother substrate;
whereinthe first slit includes at least three slits, which are arranged along the longitudinal direction of the recess or the through-hole substantially in parallel to each other and pass through within the recess or the through-hole; and
the second slit includes slits, which are formed in longitudinal and width directions of the recess or the throughhole such that the recess or the through-hole is completely included within a substantially rectangular area in plan view formed by cutting, and a slit for dividing the recess or the through-hole of the base mother substrate into two along the longitudinal direction.
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22. A manufacturing method of a tuning fork vibrator comprising the steps of:
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bonding a first principal surface of a base mother substrate having first and second principal surfaces and a recess or a through-hole with a substantially rectangular shape formed therein on a second principal surface of a mother substrate having first and second principal surfaces;
forming a first slit for completely dividing the mother substrate from the first principal surface of the mother substrate; and
forming a second slit for completely dividing the mother substrate and the base mother substrate;
whereinthe first slit includes at least three slits arranged along the longitudinal direction of the recess or the through-hole substantially in parallel to each other and passing through within the recess or the through-hole and one slit arranged along the width direction of the recess or the through-hole; and
the second slit includes slits that are arranged in directions of the recess or the through-hole, one of the second slits along the longitudinal direction, another of the second slits along the width direction, such that the recess or the through-hole is completely included within a substantially rectangular area in plan view formed by cutting.
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23. A manufacturing method of a tuning fork vibrator comprising the steps of:
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forming a substantially rectangular recess having a predetermined depth on a second principal surface of a mother substrate having first and second principal surfaces;
forming a first slit in the first principal surface of the mother substrate, the depth of the first slit being greater than the length obtained by subtracting the predetermined depth of the recess from the thickness of the mother substrate; and
forming a second slit for completely dividing the mother substrate;
whereinthe first slit includes at least three slits, which are arranged along the longitudinal direction of the recess substantially in parallel to each other and pass through within the recess in plan view; and
the second slit includes slits, which are arranged in directions of the recess, one second slit along the longitudinal direction, another second slit along the width direction, such that the recess is completely included within a substantially rectangular area formed by cutting, and a slit for dividing the recess into two along the longitudinal direction.
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24. A manufacturing method of a tuning fork vibrator comprising the steps of:
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forming a substantially rectangular recess having a predetermined depth on a second principal surface of a mother substrate having first and second principal surfaces;
forming a first slit from the first principal surface of the mother substrate, the depth of the first slit being greater than the length obtained by subtracting the predetermined depth of the recess from the thickness of the mother substrate; and
forming a second slit for completely dividing the mother substrate;
whereinthe first slit includes at least three slits arranged along the longitudinal direction of the recess substantially in parallel to each other and passing through within the recess in plan view and one slit arranged along the width direction of the recess and passing through within the recess; and
the second slit includes slits arranged such that the recess is completely included within a substantially rectangular shape formed by cutting.
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Specification