Method for manufacturing an electrostatic chuck
First Claim
Patent Images
1. A method for manufacturing an electrostatic chuck comprising the steps of:
- a) pouring a predetermined amount of an insulation material into a mold;
b) creating a hollow pathway through said insulation material;
c) pouring a predetermined amount of a conductive material into said hollow pathway to establish a conductive path;
d) pouring a predetermined amount of said conductive material on top of said ceramic material and said conductive path to produce a compact;
e) removing said compact from said mold;
f) pressing said compact to form a compact structure;
g) sintering said compact structure to form a ceramic structure under a non-oxidative atmosphere; and
h) heat treating said compact ceramic structure in an oxygen-rich environment.
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Abstract
A method for manufacturing an electrostatic chuck is disclosed wherein a sintered ceramic body having a dielectric layer made from Alumina (Al2O2) and Titanium Nitride (TiN) having a specific range of particle size is heat treated in an oxygen-rich environment in order to produce a uniform dielectric layer having no pores or micro-cracks.
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Citations
16 Claims
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1. A method for manufacturing an electrostatic chuck comprising the steps of:
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a) pouring a predetermined amount of an insulation material into a mold;
b) creating a hollow pathway through said insulation material;
c) pouring a predetermined amount of a conductive material into said hollow pathway to establish a conductive path;
d) pouring a predetermined amount of said conductive material on top of said ceramic material and said conductive path to produce a compact;
e) removing said compact from said mold;
f) pressing said compact to form a compact structure;
g) sintering said compact structure to form a ceramic structure under a non-oxidative atmosphere; and
h) heat treating said compact ceramic structure in an oxygen-rich environment. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method for manufacturing an electrostatic chuck comprising the steps of:
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a) providing a compact comprising an insulation material and an electrode formed adjacent said insulation material with a path of conductive material formed through said insulation material;
b) sintering said compact; and
c) heat treating said sintered compact in an oxygen-rich environment such that a uniform dielectric layer is formed along the electrode layer having no pores or microcracks.
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13. A method for manufacturing an electrostatic chuck comprising the steps of:
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a) providing a sintered compact comprising an electrode and a ceramic layer; and
b) heat treating the sintered compact in an oxygen-rich environment to produce a uniform dielectric layer along the electrode.
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14. A method for controlling the thickness of a dielectric layer for an electrostatic chuck comprising the steps of:
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a) providing a sintered compact comprising an electrode material having a predetermined particle size; and
b) heat treating the sintered compact in an oxygen-rich environment in order to produce a dielectric layer along said electrode material, wherein the thickness of said dielectric layer is directly related to the particle size of the electrode material. - View Dependent Claims (15, 16)
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Specification