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Articulated MEMS electrostatic rotary actuator

  • US 20040008400A1
  • Filed: 12/04/2002
  • Published: 01/15/2004
  • Est. Priority Date: 12/05/2001
  • Status: Active Grant
First Claim
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1. A micro-electro-mechanical device comprising:

  • a substrate;

    a mirror supported above the substrate, the mirror including a first plate having a reflective coating deposited thereon and configured to tilt about a first rotation axis; and

    an actuator for controlling a tilt of the first plate, the actuator including a second other plate supported above the substrate, the second plate configured to tilt about a second other rotation axis, the first and second plates being mechanically coupled via a torsional coupling hinge.

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