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Micromirrors with mechanisms for enhancing coupling of the micromirrors with electrostatic fields

  • US 20040008402A1
  • Filed: 07/03/2003
  • Published: 01/15/2004
  • Est. Priority Date: 08/11/2000
  • Status: Active Grant
First Claim
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1. A micromirror device, comprising:

  • a substrate;

    a hinge and a hinge support connected to the substrate;

    a movable reflective mirror plate, wherein the hinge is attached to the mirror plate at a first location on the mirror plate; and

    an extension plate connected to the mirror pate at a second location on the mirror plate.

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