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Method for producing metal oxide nanoparticles

  • US 20040009118A1
  • Filed: 07/15/2002
  • Published: 01/15/2004
  • Est. Priority Date: 07/15/2002
  • Status: Active Grant
First Claim
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1. A method for producing metal oxide nanoparticles, comprising the steps of:

  • (a) generating an aerosol comprising solid metallic precursor microparticles;

    (b) generating a microwave plasma with a plasma hot zone at a temperature sufficiently high to vaporize the microparticles into metal vapor;

    (c) directing the aerosol into the hot zone of the microwave-generated plasma and allowing the microparticles to vaporize to metal vapor; and

    (d) directing the metal vapor away from the plasma hot zone and into a cooler region where it cools, condenses, and oxidizes to form metal oxide particles.

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