Method for producing metal oxide nanoparticles
First Claim
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1. A method for producing metal oxide nanoparticles, comprising the steps of:
- (a) generating an aerosol comprising solid metallic precursor microparticles;
(b) generating a microwave plasma with a plasma hot zone at a temperature sufficiently high to vaporize the microparticles into metal vapor;
(c) directing the aerosol into the hot zone of the microwave-generated plasma and allowing the microparticles to vaporize to metal vapor; and
(d) directing the metal vapor away from the plasma hot zone and into a cooler region where it cools, condenses, and oxidizes to form metal oxide particles.
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Abstract
Method for producing metal oxide nanoparticles. The method includes generating an aerosol of solid metallic microparticles, generating plasma with a plasma hot zone at a temperature sufficiently high to vaporize the microparticles into metal vapor, and directing the aerosol into the hot zone of the plasma. The microparticles vaporize in the hot zone into metal vapor. The metal vapor is directed away from the hot zone and into the cooler plasma afterglow where it oxidizes, cools and condenses to form solid metal oxide nanoparticles.
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22 Claims
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1. A method for producing metal oxide nanoparticles, comprising the steps of:
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(a) generating an aerosol comprising solid metallic precursor microparticles;
(b) generating a microwave plasma with a plasma hot zone at a temperature sufficiently high to vaporize the microparticles into metal vapor;
(c) directing the aerosol into the hot zone of the microwave-generated plasma and allowing the microparticles to vaporize to metal vapor; and
(d) directing the metal vapor away from the plasma hot zone and into a cooler region where it cools, condenses, and oxidizes to form metal oxide particles. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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Specification