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Method and system for imprint lithography using an electric field

  • US 20040009673A1
  • Filed: 07/11/2002
  • Published: 01/15/2004
  • Est. Priority Date: 07/11/2002
  • Status: Active Grant
First Claim
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1. A method of preparing patterned structures on a substrate, comprising:

  • applying an activating light curable liquid to a surface of the substrate;

    positioning a template proximate to the activating light curable liquid, wherein the template comprises;

    a non-conductive layer;

    an electrically conductive layer adjacent the non-conductive layer and substantially between the non-conductive layer and the substrate, wherein the electrically conductive layer forms a contiguous pattern of structures complementary to the patterned structures to be produced on the substrate;

    applying an electric field between the template and the substrate by passing a current through the electrically conductive layer, wherein the applied electric field creates an electric static force that attracts a portion of the activating light curable liquid toward the electrically conductive layer of the template.

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