Method and system for imprint lithography using an electric field
First Claim
1. A method of preparing patterned structures on a substrate, comprising:
- applying an activating light curable liquid to a surface of the substrate;
positioning a template proximate to the activating light curable liquid, wherein the template comprises;
a non-conductive layer;
an electrically conductive layer adjacent the non-conductive layer and substantially between the non-conductive layer and the substrate, wherein the electrically conductive layer forms a contiguous pattern of structures complementary to the patterned structures to be produced on the substrate;
applying an electric field between the template and the substrate by passing a current through the electrically conductive layer, wherein the applied electric field creates an electric static force that attracts a portion of the activating light curable liquid toward the electrically conductive layer of the template.
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Abstract
A lithography process for creating patterns in an activating light curable liquid using electric fields followed by curing of the activating light curable liquid is described. The process involves the use of a template that is formed of non-conductive and electrically conductive portions. The template is brought into close proximity to the activating light curable liquid on the substrate. An external electric field is applied to the template-substrate interface while maintaining a uniform, carefully controlled gap between the template and substrate. This causes the activating light curable liquid to be attracted to the raised portions of the template. Activating light is applied to the curable liquid while an electric field is applied to the template to create a patterned layer on the substrate.
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Citations
21 Claims
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1. A method of preparing patterned structures on a substrate, comprising:
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applying an activating light curable liquid to a surface of the substrate;
positioning a template proximate to the activating light curable liquid, wherein the template comprises;
a non-conductive layer;
an electrically conductive layer adjacent the non-conductive layer and substantially between the non-conductive layer and the substrate, wherein the electrically conductive layer forms a contiguous pattern of structures complementary to the patterned structures to be produced on the substrate;
applying an electric field between the template and the substrate by passing a current through the electrically conductive layer, wherein the applied electric field creates an electric static force that attracts a portion of the activating light curable liquid toward the electrically conductive layer of the template. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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Specification