Method and apparatus for employing a light shield to modulate pixel color responsivity
First Claim
1. A pixel comprising:
- a) a substrate having a photodiode, said photodiode having a light receiving area;
b) a color filter array (CFA) material of a first color disposed above said substrate, said pixel having a first relative responsivity; and
c) a light shield disposed above the substrate, said light shield forming an aperture, said aperture having an area substantially equal to the light receiving area adjusted by a reduction factor, said reduction factor being a result of an arithmetic operation between the first relative responsivity and a second relative responsivity associated with a second pixel of a second color.
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Accused Products
Abstract
A method and apparatus for employing a light shield to modulate pixel color responsivity. The improved pixel includes a substrate having a photodiode with a light receiving area. A color filter array material of a first color is disposed above the substrate. The pixel has a first relative responsivity. A light shield is disposed above the substrate to modulate the pixel color responsivity. The light shield forms an aperture whose area is substantially equal to the light receiving area adjusted by a reduction factor. The reduction factor is the result of an arithmetic operation between the first relative responsivity and a second relative responsivity, associated with a second pixel of a second color.
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Citations
22 Claims
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1. A pixel comprising:
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a) a substrate having a photodiode, said photodiode having a light receiving area;
b) a color filter array (CFA) material of a first color disposed above said substrate, said pixel having a first relative responsivity; and
c) a light shield disposed above the substrate, said light shield forming an aperture, said aperture having an area substantially equal to the light receiving area adjusted by a reduction factor, said reduction factor being a result of an arithmetic operation between the first relative responsivity and a second relative responsivity associated with a second pixel of a second color. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method comprising the steps of:
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a) determining a relative responsivity (S1) for a pixel of a first color;
b) determining a relative responsivity (S2) for a pixel of a second color;
c) determining whether the relative responsivity (S1) for the first pixel is more than the relative responsivity (S2) of the second pixel;
if yes, forming a mask opening above the first pixel, said mask opening having an area substantially equal to the light receiving area adjusted by a reduction factor, said reduction factor being a result of an arithmetic operation between the relative responsivity of the first pixel and the relative responsivity of the second pixel; and
forming a mask opening above the second pixel, said mask opening having an area substantially equal to the light receiving area;
else, forming a mask opening above the first pixel, said mask opening having an area substantially equal to the light receiving area; and
forming a mask opening above the second pixel, said mask opening having an area substantially equal to the light receiving area adjusted by a reduction factor, said reduction factor being a result of an arithmetic operation between the relative responsivity for a second pixel and the relative responsivity of the first pixel. - View Dependent Claims (10, 11)
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12. A method to pattern an array comprising the steps of:
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a) determining a relative responsivity (S1) for pixels of a first color;
b) determining a relative responsivity (S2) for pixels of a second color;
c) determining a relative responsivity (S3) for pixels of a third color;
d) determining whether the relative responsivity (S1) for pixels of the first color is lower than the relative responsivity (S2) of pixels of the second color and the relative responsivity (S3) of pixels of a third color;
e) if yes, forming a mask opening above the pixels of the first color, said mask opening having an area substantially equal to the predetermined light receiving area;
forming a mask opening above the pixels of the second color, said mask opening having an area substantially equal to the predetermined light receiving area adjusted by a reduction factor, said reduction factor being a result of an arithmetic operation between S1 and S2; and
forming a mask opening above the pixels of a third color, said mask opening having an area substantially equal to the predetermined light receiving area adjusted by a reduction factor, said reduction factor being a result of an arithmetic operation between S1 and S3. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A method for manufacturing an improved pixel cell that employs a first metal layer as a light shield comprising the steps of:
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a) forming a substrate having active devices, said active devices including a photodiode;
b) depositing a dielectric layer on the substrate;
c) performing via lithography and etch on the dielectric layer;
d) depositing a metal in the via;
e) polishing the metal;
f) depositing a metal layer on the dielectric layer; and
g) performing lithography and etch on the metal layer by employing a metal mask, said metal mask having a plurality of openings;
wherein the mask opening above pixels of a first color having a lowest responsivity is equal to the area of the predetermined light receiving area;
wherein the mask opening above pixels of a second color having a responsivity greater than the responsivity of pixels of the first color is equal to the predetermined light receiving area multiplied by S1 divided by S2 where S1 is the relative responsivity of the first color and S2 is the relative responsivity of the second color; and
wherein the mask openings above the pixels of a third color having a responsivity greater than the responsivity of pixels of the second color is equal to the predetermined light receiving area multiplied by S1 divided by S3 where S3 is the relative responsivity of the third color.
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Specification