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MEMS device having electrothermal actuation and release and method for fabricating

  • US 20040012298A1
  • Filed: 11/08/2002
  • Published: 01/22/2004
  • Est. Priority Date: 11/09/2001
  • Status: Active Grant
First Claim
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1. A movable microcomponent suspended over a substrate, the microcomponent comprising:

  • (a) a structural layer including at least one end fixed with respect to the substrate;

    (b) a movable electrode attached to the structural layer and separated from the substrate; and

    (c) a first electrothermal component attached to the structural layer and operable to produce heat for deflecting the structural layer.

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