MEMS device having electrothermal actuation and release and method for fabricating
First Claim
1. A movable microcomponent suspended over a substrate, the microcomponent comprising:
- (a) a structural layer including at least one end fixed with respect to the substrate;
(b) a movable electrode attached to the structural layer and separated from the substrate; and
(c) a first electrothermal component attached to the structural layer and operable to produce heat for deflecting the structural layer.
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Accused Products
Abstract
MEMS Device having Electrothermal Actuation and Release and Method for Fabricating. According to one embodiment, a microscale switch is provided and can include a substrate and a stationary electrode and stationary contact formed on the substrate. The switch can further include a movable microcomponent suspended above the substrate. The microcomponent can include a structural layer including at least one end fixed with respect to the substrate. The microcomponent can further include a movable electrode spaced from the stationary electrode and a movable contact spaced from the stationary electrode. The microcomponent can include an electrothermal component attached to the structural layer and operable to produce heating for generating force for moving the structural layer.
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Citations
47 Claims
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1. A movable microcomponent suspended over a substrate, the microcomponent comprising:
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(a) a structural layer including at least one end fixed with respect to the substrate;
(b) a movable electrode attached to the structural layer and separated from the substrate; and
(c) a first electrothermal component attached to the structural layer and operable to produce heat for deflecting the structural layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A microscale switch for electrostatic and electrothermal actuation, the switch comprising:
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(a) a substrate;
(b) a stationary electrode formed on the substrate;
(c) a stationary contact formed on the substrate; and
(d) a movable microcomponent suspended above the substrate, comprising;
(i) a structural layer including at least one end fixed with respect to the substrate;
(ii) a movable electrode spaced from the stationary electrode;
(iii) a movable contact spaced from the stationary contact; and
(iv) a first electrothermal component attached to the structural layer and operable to produce heating for generating force for moving the structural layer. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35)
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36. A method for implementing a switching function in a microscale device, comprising:
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(a) providing a stationary electrode and a stationary contact formed on a substrate;
(b) providing a movable microcomponent suspended above the substrate and comprising;
(i) a structural layer including at least one end fixed with respect to the substrate;
(ii) a movable electrode spaced from the stationary electrode;
(iii) a movable contact spaced from the stationary electrode, the movable contact being positioned farther from the at least one end than the movable electrode; and
(iv) a first electrothermal component attached to the structural layer;
(c) applying a voltage between the movable electrode and the stationary electrode to electrostatically couple the movable electrode with the stationary electrode, whereby the movable component is deflected toward the substrate and the movable contact moves into contact with the stationary contact to permit an electrical signal to pass through the movable and stationary contacts; and
(d) applying a current through the first electrothermal component to produce heating for generating force for moving the microcomponent. - View Dependent Claims (37, 38, 39, 40)
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41. A method for fabricating a microscale switch, comprising:
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(a) depositing a first conductive layer on a substrate;
(b) forming a stationary electrode and a stationary contact by removing a portion of the first conductive layer;
(c) depositing a sacrificial layer on the stationary electrode, the stationary contact, and the substrate;
(d) depositing a second conductive layer on the sacrificial layer;
(e) forming a movable electrode and a movable contact by removing a portion of the second conductive layer;
(f) depositing a structural layer on the movable electrode, the movable contact, and the sacrificial layer;
(g) depositing a third conductive layer on the structural layer;
(h) removing a portion of the third conductive layer to form an electrothermal component; and
(i) removing a sufficient amount of the sacrificial layer so as to define a first gap between the stationary electrode and the movable electrode, and to define a second gap between the stationary contact and the movable contact.
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42. A method for fabricating a microscale switch, comprising:
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(a) depositing a first conductive layer on a substrate;
(b) forming a stationary electrode and a stationary contact by removing a portion of the first conductive layer;
(c) depositing a sacrificial layer on the stationary electrode, the stationary contact, and the substrate;
(d) depositing a second conductive layer on the sacrificial layer;
(e) forming a movable electrode, a movable contact, and an electrothermal component by removing a portion of the second conductive layer;
(f) depositing a structural layer on the movable electrode, the movable contact, and the sacrificial layer; and
(g) removing a sufficient amount of the sacrificial layer so as to define a first gap between the stationary electrode and the movable electrode, and to define a second gap between the stationary contact and the movable contact.
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43. A method for implementing a switching function in a microscale device having a movable microcomponent, comprising:
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(a) applying a voltage between a movable electrode and a stationary electrode of the microscale device for electrostatically coupling the movable electrode with the stationary electrode, whereby the movable microcomponent is deflected and a movable contact moves into contact with a stationary contact to permit an electrical signal to pass through the movable and stationary contacts; and
(b) applying a current through a first electrothermal component of the microscale device to produce heating for generating force for moving the microcomponent. - View Dependent Claims (44, 45, 46, 47)
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Specification