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Kit of parts for assembling an optical element, method of assembling an optical element, optical element, lithographic apparatus, and device manufacturing method

  • US 20040012764A1
  • Filed: 05/29/2003
  • Published: 01/22/2004
  • Est. Priority Date: 05/31/2002
  • Status: Active Grant
First Claim
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1. A kit of parts for assembling an optical element for effecting a desired change in incident radiation at a plane of a radiation system of a lithographic apparatus, the kit of parts comprising:

  • a plurality of previously manufactured optical components, each component having an effect on the incident radiation, wherein the effect of at least some of the optical components is different than the effect of others of the optical components; and

    a support constructed and arranged to hold a user selectable subset of the plurality of optical components in an array.

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