Spatial light modulators with light blocking and absorbing areas
First Claim
1. A method for making a spatial light modulator, comprising:
- providing a first substrate and a second substrate;
forming an array of circuitry and electrodes on the second substrate;
forming a light blocking layer on the first substrate to selectively block the passage of light through the first substrate;
forming an array of deflectable reflective elements on the first or second substrate; and
positioning the first and second substrates proximate to each other to form a substrate assembly.
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Accused Products
Abstract
A projection system, a spatial light modulator, and a method for forming a MEMS device are disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micro-mirror array. The two substrates can be bonded at the wafer level after depositing a getter material and/or solid or liquid lubricant on one or both of the wafers if desired. In one embodiment of the invention, one of the substrates is a light transmissive substrate and a light blocking layer that is preferably a light absorbing layer is provided on the light transmissive substrate to selectively block light from passing through the substrate. The light blocking layer can be formed as a pattern, such as a grid or strips for blocking light from entering gaps between adjacent micro-mirrors.
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Citations
199 Claims
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1. A method for making a spatial light modulator, comprising:
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providing a first substrate and a second substrate;
forming an array of circuitry and electrodes on the second substrate;
forming a light blocking layer on the first substrate to selectively block the passage of light through the first substrate;
forming an array of deflectable reflective elements on the first or second substrate; and
positioning the first and second substrates proximate to each other to form a substrate assembly. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83, 84, 85)
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86. A spatial light modulator, comprising:
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a first substrate and a second substrate;
an array of circuitry and electrodes on the second substrate;
a light blocking layer on the first substrate disposed to selectively block the passage of light through the first substrate; and
an array of deflectable reflective elements on the first or second substrate;
wherein the first and second substrates are positioned proximate to each other as a substrate assembly. - View Dependent Claims (87, 88, 89, 90, 91, 92, 93, 94, 95, 96, 97, 98, 99, 100, 101, 102, 103, 104, 105, 106, 107, 108, 109, 110, 111, 112, 113, 114, 115, 116, 117, 118, 119, 120, 121, 122, 123, 124, 125, 126, 127, 128, 129, 130, 131, 132, 133)
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134. A projection system, comprising:
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a light source;
a spatial light modulator for reflecting a beam of light from the light source; and
projection optics for projecting light reflected off of the spatial light modulator;
wherein the spatial light modulator comprises;
a first substrate and a second substrate;
an array of circuitry and electrodes on the second substrate;
a light blocking layer on the first substrate disposed to selectively block the passage of light through the first substrate; and
an array of deflectable reflective elements on the first or second substrate; and
wherein the first and second substrates are bonded together other as a substrate assembly. - View Dependent Claims (135, 136, 137, 138, 139, 140, 141, 142, 143, 144, 145, 146, 147, 148, 149, 150, 151, 152, 153, 154, 155, 156, 157, 158, 159, 160, 161, 162, 163, 164, 165, 166, 167, 168, 169, 170, 171, 172, 173, 174, 175, 176, 177, 178, 179, 180, 181)
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182. A method for making a spatial light modulator, comprising:
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providing a first substrate and a second substrate;
forming an array of circuitry and electrodes on the second substrate;
forming a plurality of strips or frame areas on the first substrate to block at least 50% of the light from passing through the first substrate in the areas of the strips or frame areas;
forming an array of deflectable reflective elements on the first or second substrate; and
bonding the first and second substrates together to form a substrate assembly.
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183. A spatial light modulator, comprising:
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a first substrate and a second substrate;
an array of circuitry and electrodes on the second substrate;
an opaque layer that forms a pattern on the first substrate in order to selectively block at least 50% of the light from passing through the first substrate in the areas where the opaque layer is disposed; and
an array of deflectable reflective elements on the first or second substrate;
wherein the first and second substrates are bonded together other as a substrate assembly.
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184. A spatial light modulator comprising:
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a first substrate and a second substrate within or forming a MEMS package; and
an array of circuitry, electrodes and micromirrors on the second substrate;
wherein the first substrate is a substrate transmissive to visible light and is disposed at a distance from the first substrate of 100 microns or less. - View Dependent Claims (185, 186, 187, 188, 189, 190, 191, 192, 193, 194, 195, 196, 197, 198)
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199. A projection system, comprising:
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a light source;
a spatial light modulator for reflecting a beam of light from the light source; and
a series of projection optics for projecting light reflected off of the spatial light modulator;
wherein the spatial light modulator comprises;
a first substrate and a second substrate within or forming a MEMS package; and
an array of circuitry, electrodes and micromirrors on the second substrate; and
wherein the first substrate is a substrate transmissive to visible light and is disposed at a distance from the first substrate of 100 microns or less.
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Specification