Method and apparatus for supporting a substrate
First Claim
1. An apparatus for performing operations on at least one surface of an electronic substrate having a first surface and a second surface, the apparatus comprising:
- a frame;
a transportation system that moves the substrate through the apparatus;
a substrate support system coupled to the frame that supports the substrate during an operation on the substrate, wherein the substrate support system includes a deformable material; and
a device coupled to the frame that performs an operation on a surface of the substrate.
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Accused Products
Abstract
An apparatus and method for performing operations on an electronic substrate includes a frame, a transportation system that moves the substrate through the apparatus, a substrate support system coupled to the frame that supports the substrate during a manufacturing operation on the substrate, wherein the substrate support system includes a deformable material, and a device coupled to the frame that performs an operation on a surface of the substrate. Manufacturing operations are performed on the substrate while the substrate is substantially evenly supported by the deformable material.
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Citations
20 Claims
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1. An apparatus for performing operations on at least one surface of an electronic substrate having a first surface and a second surface, the apparatus comprising:
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a frame;
a transportation system that moves the substrate through the apparatus;
a substrate support system coupled to the frame that supports the substrate during an operation on the substrate, wherein the substrate support system includes a deformable material; and
a device coupled to the frame that performs an operation on a surface of the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 11)
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9. A method of performing an operation on an electronic substrate, the method comprising:
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loading the substrate into a processing machine;
supporting the substrate with a deformable material that conforms to a surface of the electronic substrate;
performing a manufacturing operation on the substrate; and
removing the substrate from the processing machine. - View Dependent Claims (10, 12, 13, 14, 15)
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16. An apparatus for supporting an electronic substrate during a manufacturing operation, the apparatus comprising:
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a frame;
means, coupled to the frame, for supporting electronic substrates, including a deformable material which conforms to a surface of the substrate to be supported during manufacturing. - View Dependent Claims (17, 18, 19, 20)
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Specification