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Method and apparatus for supporting a substrate

  • US 20040016113A1
  • Filed: 06/19/2002
  • Published: 01/29/2004
  • Est. Priority Date: 06/19/2002
  • Status: Abandoned Application
First Claim
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1. An apparatus for performing operations on at least one surface of an electronic substrate having a first surface and a second surface, the apparatus comprising:

  • a frame;

    a transportation system that moves the substrate through the apparatus;

    a substrate support system coupled to the frame that supports the substrate during an operation on the substrate, wherein the substrate support system includes a deformable material; and

    a device coupled to the frame that performs an operation on a surface of the substrate.

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