Apparatus and a method for forming an alloy layer over a substrate
First Claim
1. A system comprising:
- a chamber configured to house a substrate for processing;
an energy source coupled to the chamber;
a system controller configured to control the introduction of at least two metal constituents to a focused ion beam and to control the introduction of the focused ion beam; and
a memory coupled to the controller comprising a computer-readable medium having a computer-readable program embodied therein for directing operation of the system, the computer-readable program comprising;
instructions for controlling the energy source and for introducing the metal constituents by one of;
(1) mixing the at least two metal constituents and introducing the at least two metal constituents into a chamber in which a focused ion beam contacts the at least two metal constituents to form a first alloy layer over a substrate;
(2) introducing at about the same time at least two precursor gas sources in which each precursor gas source contains a respective one of the at least two metal constituents and the focused ion beam contacts the at least two precursor gases to form a first alloy layer over a substrate, and (3) forming a first layer of a first of the at least two metal constituents and a second layer of a second of the at least two metal constituents to create a multi-metal layer and performing one of thermal treatment and introducing focused ion beam to at least a portion of the multi-metal layer to form a first alloy layer over a substrate.
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Abstract
One embodiment of the invention involves introducing at least two metals into a chamber for forming an alloy layer over a substrate. This is accomplished by a variety of methods. In one embodiment, at least two metals are mixed and introduced into a chamber in which a focused ion beam contacts the two metals to form at least one alloy layer over a substrate. In another embodiment, at least two precursor gas sources are introduced into the chamber in which each precursor gas source contains a metal. The focused ion beam contacts the two precursor gases to form an alloy layer over the substrate. In yet another embodiment, a second metal layer is formed over a first metal layer to form a multi-metal layer. Thereafter, thermal treatment or introducing a focused ion beam to at least a portion of the multi-metal layer is performed to create at least one alloy layer over the substrate.
47 Citations
11 Claims
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1. A system comprising:
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a chamber configured to house a substrate for processing;
an energy source coupled to the chamber;
a system controller configured to control the introduction of at least two metal constituents to a focused ion beam and to control the introduction of the focused ion beam; and
a memory coupled to the controller comprising a computer-readable medium having a computer-readable program embodied therein for directing operation of the system, the computer-readable program comprising;
instructions for controlling the energy source and for introducing the metal constituents by one of;
(1) mixing the at least two metal constituents and introducing the at least two metal constituents into a chamber in which a focused ion beam contacts the at least two metal constituents to form a first alloy layer over a substrate;
(2) introducing at about the same time at least two precursor gas sources in which each precursor gas source contains a respective one of the at least two metal constituents and the focused ion beam contacts the at least two precursor gases to form a first alloy layer over a substrate, and (3) forming a first layer of a first of the at least two metal constituents and a second layer of a second of the at least two metal constituents to create a multi-metal layer and performing one of thermal treatment and introducing focused ion beam to at least a portion of the multi-metal layer to form a first alloy layer over a substrate. - View Dependent Claims (2, 3, 4, 5)
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6. A machine readable storage medium containing executable program instructions which when executed cause a system to perform a method comprising:
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controlling introduction of at least two metal constituents into a chamber;
controlling a formation of an alloy from the at least two metal constituents by controlling one of;
(1) introducing the at least two metal constituents into a chamber in which a focused ion beam contacts the two metal constituents to form a first alloy layer over a substrate;
(2) introducing at about the same time at least two precursor gas sources in which each precursor gas source contains a respective one of the at least two metal constituents and the focused ion beam contacts the at least two precursor gases to form a first alloy layer over the substrate, and (3) forming a first layer of a first of the at least two metal constituents and a second layer of a second of the at least two metal constituents a multi-metal layer and performing one of thermal treatment and introducing focused ion beam to at least a portion of the multi-metal layer to form a first alloy layer over a substrate. - View Dependent Claims (7, 8, 9, 10, 11)
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Specification