Semiconductor unit, semiconductor apparatus, and method for making the same, electrooptic apparatus, and electronic apparatus
First Claim
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1. A semiconductor unit, comprising:
- a functional layer including a semiconductor element; and
a highly conductive layer.
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Abstract
The invention provides a semiconductor unit and a semiconductor apparatus having a low electric resistance as a whole, even when the electric resistance of a functional layer or a semiconductor substrate is high. A method of making the semiconductor unit and apparatus is also provided. An electrooptic apparatus and an electronic apparatus are also provided. A semiconductor apparatus includes a predetermined substrate and a semiconductor unit bonded to the substrate. The semiconductor unit includes a highly conductive layer and a functional layer including a semiconductor element.
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Citations
18 Claims
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1. A semiconductor unit, comprising:
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a functional layer including a semiconductor element; and
a highly conductive layer. - View Dependent Claims (3, 10)
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2. A semiconductor apparatus, comprising:
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a semiconductor substrate;
a functional layer including a semiconductor element, the functional layer being formed on a surface of the semiconductor substrate; and
a highly conductive layer. - View Dependent Claims (4, 5, 6, 7, 8, 9, 11, 12)
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13. A method of making a semiconductor unit, comprising:
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forming a functional layer including a semiconductor element, and a highly conductive layer on a surface of a semiconductor substrate; and
separating the functional layer and the highly conductive layer placed on the semiconductor substrate from the semiconductor substrate. - View Dependent Claims (15, 16, 17, 18)
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14. A method of making a semiconductor unit, comprising:
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forming a functional film including semiconductor element, and a highly conductive layer on a surface of a semiconductor substrate;
bonding a film to the surface of the semiconductor substrate, the surface being provided with the semiconductor element; and
separating the functional layer and the highly conductive layer from the semiconductor substrate.
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Specification