Wiring structure
First Claim
Patent Images
1. A wiring structure comprising:
- a first wiring;
a second wiring provided at a higher side than said first wiring; and
a joint intervening between said first wiring and said second wiring configured to connect said first wiring with said second wiring, wherein said second wiring comprises a main portion and a barrier metal covering a lower end of said main portion, and one of said first wiring and said second wiring serves as a fuse removable when subjected to a laser blow at a region other than a portion where said one of said first wiring and said second wiring is connected to said joint.
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Accused Products
Abstract
The present invention protects a wiring against an etchant when a fuse connected to this wiring is subjected to a laser blow. A fuse has a barrier metal at its lower side. A plug is connected to the lower side of the fuse. The plug has a barrier metal at least at its lower side. Even if the fuse is partly removed through the laser blow at a region other than a portion where the fuse is connected to the plug, two layers of the barrier metals remain between the removed portion and a lower wiring. This enlarges the margin for preventing the adverse influence, such as corrosion and breaking of the lower wiring, brought by an etchant associated in other manufacturing process.
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Citations
20 Claims
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1. A wiring structure comprising:
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a first wiring;
a second wiring provided at a higher side than said first wiring; and
a joint intervening between said first wiring and said second wiring configured to connect said first wiring with said second wiring, wherein said second wiring comprises a main portion and a barrier metal covering a lower end of said main portion, and one of said first wiring and said second wiring serves as a fuse removable when subjected to a laser blow at a region other than a portion where said one of said first wiring and said second wiring is connected to said joint. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A wiring structure comprising:
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a first wiring;
a second wiring provided at a higher side than said first wiring, said second wiring being connected to said first wiring, wherein said first wiring comprises a main portion and an anti-reflection film covering an upper end of said main portion, said second wiring comprising a main portion and a barrier metal covering a lower end of said main portion of the second wiring, and said first wiring serves as a fuse removable when subjected to a laser blow at a region other than a portion where said first wiring is connected to said second wiring.
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19. A wiring structure comprising:
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a fuse which is embedded in an insulator and is connected to a wiring, and is partly removed at a region other than a portion where said fuse is connected to said wiring, and a coating layer covering an exposed surface of the partly removed fuse. - View Dependent Claims (20)
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Specification