Deformable mirror with high-bandwidth servo for rigid body control
First Claim
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1. A deformable mirror arrangement comprising:
- a deformable mirror; and
a plurality of constraint mechanisms contacting said mirror at specified contact positions, at least three of said constraint mechanisms being rigid body servo control mechanisms each including a force actuator contacting said mirror at a corresponding one of said contact positions, a position sensor assisting to measure position of said mirror and a servo control unit for controlling said force actuator.
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Abstract
A deformable mirror arrangement has a plurality of constraint mechanisms contacting a deformable mirror at specified contact positions. At least three of these constraint mechanisms are rigid body servo control mechanisms such as high-bandwidth servo control mechanisms, each including a force actuator contacting the mirror at a corresponding one of the contact positions, a position sensor assisting to measure position of the mirror and a servo control unit for controlling the force actuator.
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Citations
19 Claims
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1. A deformable mirror arrangement comprising:
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a deformable mirror; and
a plurality of constraint mechanisms contacting said mirror at specified contact positions, at least three of said constraint mechanisms being rigid body servo control mechanisms each including a force actuator contacting said mirror at a corresponding one of said contact positions, a position sensor assisting to measure position of said mirror and a servo control unit for controlling said force actuator. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method of controlling degrees of freedom of a deformable mirror, said method comprising the steps of:
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providing a plurality of constraint mechanisms contacting said mirror at specified contact positions, at least three of said constraint mechanisms being rigid body servo control mechanisms each including a force actuator contacting said mirror at a corresponding one of said contact positions, a position sensor assisting to measure position of said mirror and a servo control unit for controlling said force actuator; and
operating said constraint mechanisms to control degrees of freedom of said deformable mirror. - View Dependent Claims (10, 11, 12, 13, 14)
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15. A lithography system for projecting a pattern on a wafer by a projection beam by preliminarily determining a surface profile of the wafer on a stage and subsequently introducing the stage with the wafer into the projection beam, said lithographic system comprising:
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an illumination source;
an optical system including a deformable mirror assembly;
a reticle stage arranged to retain a reticle;
a working stage arranged to retain a workpiece; and
an enclosure that surrounds at least a portion of the working stage, the enclosure having a sealing surface;
wherein said deformable mirror assembly includes a deformable mirror and a plurality of constraint mechanisms contacting said mirror at different contact positions, at least three of said constraint mechanisms being rigid body servo control mechanisms each including a force actuator contacting said mirror at a corresponding one of said contact positions, a position sensor for detecting the corresponding contact position and a servo control unit for controlling said force actuator. - View Dependent Claims (16, 17, 18, 19)
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Specification