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BULK SILICON MIRRORS WITH HINGES UNDERNEATH

  • US 20040017625A1
  • Filed: 05/31/2002
  • Published: 01/29/2004
  • Est. Priority Date: 06/02/2001
  • Status: Active Grant
First Claim
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1. An apparatus comprising:

  • a) a bulk element having a device surface and a bottom surface, disposed below said device surface;

    b) a support; and

    c) at least one hinge, which is disposed below said bottom surface, and which is coupled to said bulk element and to said support, thereby suspending said bulk element from said support.

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